January 2013 Archives by date

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Starting: Fri Jan 11 13:09:19 PST 2013
Ending: Fri Jan 11 13:09:19 PST 2013
Messages: 123

• Problem pquest SNF 2012-11-13 17:52:46: Al etch issues   cbaxter at snf.stanford.edu
• Problem pquest SNF 2012-09-27 23:02:03: Process Pump Ready Shows Alarm   robertchen at snf.stanford.edu
• Shutdown pquest SNF 2012-12-17 09:44:25: wafer clamp not working   eenriquez at snf.stanford.edu
• Problem pquest SNF 2012-09-26 12:15:14: Clamp making noise, seems "tilted"   kgc at snf.stanford.edu
• Problem pquest SNF 2012-08-09 08:49:09: backside He flow high   jimkruger at snf.stanford.edu
• Comment pquest SNF 2012-08-09 13:52:47: He backside flow better, varies   jimkruger at snf.stanford.edu
• Problem pquest SNF 2012-08-31 11:36:47: Backside He is 18.8sccm   eenriquez at snf.stanford.edu
• Comment pquest SNF 2011-11-17 11:00:48: J Kruger's comments on unstable plasma   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2012-11-18 23:51:36: wafer stuck inside   maxms at snf.stanford.edu
• Problem pquest SNF 2012-11-13 08:45:34: CF4   mdickey at snf.stanford.edu
• Problem pquest SNF 2012-08-09 08:49:09: backside He flow high   cbaxter at snf.stanford.edu
• Shutdown pquest SNF 2012-08-17 16:25:04: no process cooling water   cbaxter at snf.stanford.edu
• Problem pquest SNF 2012-10-29 17:06:55: RF Power Not Working?   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2012-09-25 15:30:22: Wafer stuck in chamber   derickson at snf.stanford.edu
• Problem pquest SNF 2012-11-13 10:01:32: CF4   cbaxter at snf.stanford.edu
• Comment pquest SNF 2012-08-27 14:45:58: Update backside helium   eenriquez at snf.stanford.edu
• Comment pquest SNF 2012-12-11 16:15:02: ETA on light pen?   wslee at snf.stanford.edu
• Shutdown pquest SNF 2012-09-25 15:30:22: Wafer stuck in chamber   cbaxter at snf.stanford.edu
• Comment pquest SNF 2012-10-15 14:35:26: Clamping noise   derickson at snf.stanford.edu
• Comment pquest SNF 2012-10-09 15:01:33: Ch4 is not available.   eenriquez at snf.stanford.edu
• Comment pquest SNF 2012-10-09 15:01:33: Ch4 is not available.   eenriquez at snf.stanford.edu
• Comment pquest SNF 2012-11-10 08:07:41: Fluorine week extended to 11/19   mtang at snf.stanford.edu
• Shutdown pquest SNF 2012-11-08 21:19:18: Wafer broken inside   luckys at snf.stanford.edu
• Comment pquest SNF 2012-08-31 13:14:57: Backside He flow   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2012-12-11 12:38:35: Light pen doesn't activate   mtang at snf.stanford.edu
• Problem pquest SNF 2012-09-27 23:02:03: Process Pump Ready Shows Alarm   eenriquez at snf.stanford.edu
• Comment pquest SNF 2012-07-26 20:15:35: Fluorine time extended to Monday   eenriquez at snf.stanford.edu
• Problem pquest SNF 2012-10-29 16:25:24: RF Power not working   kgc at snf.stanford.edu
• Comment pquest SNF 2012-09-25 11:07:20: one of the port covers is missing   gyama at snf.stanford.edu
• Problem pquest SNF 2012-08-03 16:37:45: PQuest bias voltage "jumping"; RF effect on He   cbaxter at snf.stanford.edu
• Problem pquest SNF 2012-08-31 11:36:47: Backside He is 18.8sccm   eenriquez at snf.stanford.edu
• Comment pquest SNF 2012-07-23 10:07:22: Software Issue   eenriquez at snf.stanford.edu
• Problem pquest SNF 2012-12-03 14:15:13: incomplete strip   faridz at snf.stanford.edu
• Shutdown pquest SNF 2012-10-01 20:22:15: Wafer fell off while loading   mdickey at snf.stanford.edu
• Shutdown pquest SNF 2012-10-30 06:00:24: RF Power is low   eenriquez at snf.stanford.edu
• Comment pquest SNF 2012-09-21 10:49:20: wet clean   mdickey at snf.stanford.edu
• Shutdown pquest SNF 2012-12-12 16:19:38: wafer broken at loading   zzp at snf.stanford.edu
• Comment pquest SNF 2012-07-31 14:47:21: pen holder is a through hole now...   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2012-08-31 09:14:39: Clamp problem   eenriquez at snf.stanford.edu
• Comment pquest SNF 2012-10-15 14:35:26: Clamping noise   cbaxter at snf.stanford.edu
• Shutdown pquest SNF 2012-10-03 09:08:30: Vacuum pump problem   eenriquez at snf.stanford.edu
• Problem pquest SNF 2012-10-29 17:06:55: RF Power Not Working?   vijayn at snf.stanford.edu
• Shutdown pquest SNF 2012-11-15 19:51:52: broken wafer   ouyang at snf.stanford.edu
• Comment pquest SNF 2012-08-06 16:35:57: PQ OK   eenriquez at snf.stanford.edu
• Problem pquest SNF 2012-12-10 22:21:20: chuck does not cool down   wslee at snf.stanford.edu
• Problem pquest SNF 2012-11-13 17:52:46: Al etch issues   jimkruger at snf.stanford.edu
• Comment pquest SNF 2012-04-16 09:02:35: Update ECR power problem   eenriquez at snf.stanford.edu
• Comment pquest SNF 2012-05-01 09:06:04: Added microwave turn on step to oxygen3 recipe   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2012-10-03 09:08:30: Vacuum pump problem   eenriquez at snf.stanford.edu
• Comment pquest SNF 2012-12-11 16:15:02: ETA on light pen?   cbaxter at snf.stanford.edu
• Problem pquest SNF 2012-10-18 13:16:01: Clamp-down sensor needs adjustment   jimkruger at snf.stanford.edu
• Problem pquest SNF 2012-08-02 12:56:07: DC Bias and backside   cbaxter at snf.stanford.edu
• Problem pquest SNF 2012-09-21 23:09:18: wafer lost in the chamber   cbaxter at snf.stanford.edu
• Comment pquest SNF 2012-08-09 13:52:47: He backside flow better, varies   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2012-10-03 17:59:00: wafer fell off pins while loading, still in pquest   bucklesm at snf.stanford.edu
• Comment pquest SNF 2012-12-11 18:41:48: New light pen   cbaxter at snf.stanford.edu
• Shutdown pquest SNF 2012-09-04 12:49:46: broken wafer piece left inside   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2012-08-17 16:25:04: no process cooling water   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2012-09-03 15:51:04: wafer stuck in chamber   eenriquez at snf.stanford.edu
• Problem pquest SNF 2012-08-31 11:36:47: Backside He is 18.8sccm   kgc at snf.stanford.edu
• Comment pquest SNF 2012-03-27 13:14:22: Plasma strikes Okay!   eenriquez at snf.stanford.edu
• Problem pquest SNF 2012-09-26 12:15:14: Clamp making noise, seems "tilted"   eenriquez at snf.stanford.edu
• Problem pquest SNF 2012-08-06 12:42:41: bias voltage, He flow, and temperature problems   cbaxter at snf.stanford.edu
• Comment pquest SNF 2012-06-15 10:04:25: wet clean   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2012-08-30 10:23:45: wafer unload problem.   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2012-10-30 06:00:24: RF Power is low   mtang at snf.stanford.edu
• Shutdown pquest SNF 2012-10-31 10:52:08: load arm problem   eenriquez at snf.stanford.edu
• Comment pquest SNF 2012-07-30 08:05:01: wet clean   eenriquez at snf.stanford.edu
• Problem pquest SNF 2012-08-24 10:58:57: Backside He still bad   jimkruger at snf.stanford.edu
• Problem pquest SNF 2012-10-29 16:25:24: RF Power not working   eenriquez at snf.stanford.edu
• Problem pquest SNF 2012-12-10 22:21:20: chuck does not cool down   eenriquez at snf.stanford.edu
• Comment pquest SNF 2012-08-27 14:45:58: Update backside helium   eenriquez at snf.stanford.edu
• Problem pquest SNF 2012-08-22 15:43:38: BackSide He very high = 8.4   cbaxter at snf.stanford.edu
• Shutdown pquest SNF 2012-08-30 10:23:45: wafer unload problem.   faridz at snf.stanford.edu
• Shutdown pquest SNF 2012-11-15 19:51:52: broken wafer   cbaxter at snf.stanford.edu
• Shutdown pquest SNF 2012-11-18 23:51:36: wafer stuck inside   mdickey at snf.stanford.edu
• Shutdown pquest SNF 2012-10-01 20:22:15: Wafer fell off while loading   marina01 at snf.stanford.edu
• Comment pquest SNF 2012-08-06 16:35:57: PQ OK   jimkruger at snf.stanford.edu
• Problem pquest SNF 2012-08-24 10:58:57: Backside He still bad   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2012-09-03 15:51:04: wafer stuck in chamber   bucklesm at snf.stanford.edu
• Problem pquest SNF 2012-08-06 12:42:41: bias voltage, He flow, and temperature problems   bajcsy at snf.stanford.edu
• Shutdown pquest SNF 2012-10-31 10:52:08: load arm problem   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2012-10-03 17:59:00: wafer fell off pins while loading, still in pquest   mdickey at snf.stanford.edu
• Problem pquest SNF 2012-11-13 10:01:32: CF4   mdickey at snf.stanford.edu
• Problem pquest SNF 2012-12-07 15:29:15: unexpected errors   cbaxter at snf.stanford.edu
• Shutdown pquest SNF 2012-12-17 09:44:25: wafer clamp not working   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2012-09-04 12:49:46: broken wafer piece left inside   jimkruger at snf.stanford.edu
• Problem pquest SNF 2012-09-21 23:09:18: wafer lost in the chamber   zzp at snf.stanford.edu
• Problem pquest SNF 2012-10-18 13:16:01: Clamp-down sensor needs adjustment   cbaxter at snf.stanford.edu
• Shutdown pquest SNF 2012-11-08 21:19:18: Wafer broken inside   mdickey at snf.stanford.edu
• Problem pquest SNF 2012-12-03 14:15:13: incomplete strip   vilanova at snf.stanford.edu
• Problem pquest SNF 2012-11-13 08:45:34: CF4   cbaxter at snf.stanford.edu
• Problem pquest SNF 2012-08-22 15:43:38: BackSide He very high = 8.4   jimkruger at snf.stanford.edu
• Shutdown pquest SNF 2012-12-11 12:38:35: Light pen doesn't activate   cbaxter at snf.stanford.edu
• Problem pquest SNF 2012-12-07 15:29:15: unexpected errors   marina01 at snf.stanford.edu
• Comment pquest SNF 2012-04-27 11:11:34: Update microwave generator   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2012-08-31 09:14:39: Clamp problem   eenriquez at snf.stanford.edu
• Shutdown pquest SNF 2012-12-12 16:19:38: wafer broken at loading   eenriquez at snf.stanford.edu
• Problem pquest: Turbo pump problem?   pelton at snf.stanford.edu
• Problem Clear pquest: turbo sound's normal and its @speed holding base pres   cbaxter at snf.stanford.edu
• Shutdown pquest:   rpu at snf.stanford.edu
• Shutdown Clear pquest: removed wafer & restarted turbo pump.   booth at snf.stanford.edu
• Shutdown pquest: wafer stuck in machine   gkeeler at snf.stanford.edu
• Shutdown Clear pquest: removed stuck wafer & cleaned clamp w/Acetone   booth at snf.stanford.edu
• Problem pquest: Need a new public wafer carrier.   booth at snf.stanford.edu
• Problem pquest: Trouble loading wafers: Often skips loading step   pelton at snf.stanford.edu
• Shutdown pquest: Wafer fallen off pins: stuck in chamber   pelton at snf.stanford.edu
• Shutdown Clear pquest: Removed smashed wafer. Jim   mcvittie at snf.stanford.edu
• Problem pquest: BCl3 gas flow too low on Plasma Quest   gkeeler at snf.stanford.edu
• Problem Clear pquest: Purge panel ESO vavle was clodsed.   booth at snf.stanford.edu
• Problem pquest: pquest   rpu at snf.stanford.edu
• Problem pquest:   qyuan at snf.stanford.edu
• Problem Clear pquest: restarted turbo pump& unloaded wafer   booth at snf.stanford.edu
• Shutdown pquest: Turbopump not working   pelton at snf.stanford.edu
• Shutdown Clear pquest: restarted turbo again.   booth at snf.stanford.edu
• Problem Clear pquest: perhaps backside films fooled the wafer sensor?   booth at snf.stanford.edu
• Problem Clear pquest: check for enable LED's to be ON.   booth at snf.stanford.edu
• Problem pquest: pquest   rpu at snf.stanford.edu
• Shutdown pquest:   rpu at snf.stanford.edu
• Shutdown Clear pquest:   booth at snf.stanford.edu
• Problem Clear pquest:   booth at snf.stanford.edu
• Shutdown pquest: Grease on clamp - must be cleaned   booth at snf.stanford.edu
• Shutdown Clear pquest: cleaned grease from clamp   booth at snf.stanford.edu

Last message date: Fri Jan 11 13:09:19 PST 2013
Archived on: Fri Jan 11 13:09:37 PST 2013

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