January 2013 Archives by thread

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Starting: Fri Jan 11 13:09:19 PST 2013
Ending: Fri Jan 11 13:09:19 PST 2013
Messages: 123

Problem pquest: Turbo pump problem? pelton at snf.stanford.edu
Problem Clear pquest: turbo sound's normal and its @speed holding base pres cbaxter at snf.stanford.edu
Shutdown pquest: Grease on clamp - must be cleaned booth at snf.stanford.edu
Shutdown Clear pquest: cleaned grease from clamp booth at snf.stanford.edu
Shutdown Clear pquest: removed wafer & restarted turbo pump. booth at snf.stanford.edu
Shutdown pquest: wafer stuck in machine gkeeler at snf.stanford.edu
Shutdown Clear pquest: removed stuck wafer & cleaned clamp w/Acetone booth at snf.stanford.edu
Problem pquest: Need a new public wafer carrier. booth at snf.stanford.edu
Problem pquest: Trouble loading wafers: Often skips loading step pelton at snf.stanford.edu
Shutdown pquest: Wafer fallen off pins: stuck in chamber pelton at snf.stanford.edu
Shutdown Clear pquest: Removed smashed wafer. Jim mcvittie at snf.stanford.edu
Problem pquest: pquest rpu at snf.stanford.edu
- Problem pquest: pquest rpu at snf.stanford.edu
Problem pquest: BCl3 gas flow too low on Plasma Quest gkeeler at snf.stanford.edu
Problem pquest SNF 2012-08-06 12:42:41: bias voltage, He flow, and temperature problems bajcsy at snf.stanford.edu
- Problem pquest SNF 2012-08-06 12:42:41: bias voltage, He flow, and temperature problems cbaxter at snf.stanford.edu
Comment pquest SNF 2012-08-06 16:35:57: PQ OK jimkruger at snf.stanford.edu
- Comment pquest SNF 2012-08-06 16:35:57: PQ OK eenriquez at snf.stanford.edu
Problem pquest SNF 2012-08-02 12:56:07: DC Bias and backside cbaxter at snf.stanford.edu
Problem pquest SNF 2012-08-03 16:37:45: PQuest bias voltage "jumping"; RF effect on He cbaxter at snf.stanford.edu
Problem pquest SNF 2012-08-09 08:49:09: backside He flow high jimkruger at snf.stanford.edu
- Problem pquest SNF 2012-08-09 08:49:09: backside He flow high cbaxter at snf.stanford.edu
Comment pquest SNF 2012-08-09 13:52:47: He backside flow better, varies jimkruger at snf.stanford.edu
- Comment pquest SNF 2012-08-09 13:52:47: He backside flow better, varies eenriquez at snf.stanford.edu
Shutdown pquest SNF 2012-08-17 16:25:04: no process cooling water eenriquez at snf.stanford.edu
- Shutdown pquest SNF 2012-08-17 16:25:04: no process cooling water cbaxter at snf.stanford.edu
Problem pquest SNF 2012-08-22 15:43:38: BackSide He very high = 8.4 jimkruger at snf.stanford.edu
- Problem pquest SNF 2012-08-22 15:43:38: BackSide He very high = 8.4 cbaxter at snf.stanford.edu
Problem pquest SNF 2012-08-24 10:58:57: Backside He still bad jimkruger at snf.stanford.edu
- Problem pquest SNF 2012-08-24 10:58:57: Backside He still bad eenriquez at snf.stanford.edu
Comment pquest SNF 2012-08-27 14:45:58: Update backside helium eenriquez at snf.stanford.edu
- Comment pquest SNF 2012-08-27 14:45:58: Update backside helium eenriquez at snf.stanford.edu
Shutdown pquest SNF 2012-08-30 10:23:45: wafer unload problem. faridz at snf.stanford.edu
- Shutdown pquest SNF 2012-08-30 10:23:45: wafer unload problem. eenriquez at snf.stanford.edu
Shutdown pquest SNF 2012-08-31 09:14:39: Clamp problem eenriquez at snf.stanford.edu
- Shutdown pquest SNF 2012-08-31 09:14:39: Clamp problem eenriquez at snf.stanford.edu
Problem pquest SNF 2012-08-31 11:36:47: Backside He is 18.8sccm kgc at snf.stanford.edu
- Problem pquest SNF 2012-08-31 11:36:47: Backside He is 18.8sccm eenriquez at snf.stanford.edu
  - Problem pquest SNF 2012-08-31 11:36:47: Backside He is 18.8sccm eenriquez at snf.stanford.edu
Comment pquest SNF 2012-08-31 13:14:57: Backside He flow eenriquez at snf.stanford.edu
Shutdown pquest SNF 2012-09-03 15:51:04: wafer stuck in chamber bucklesm at snf.stanford.edu
- Shutdown pquest SNF 2012-09-03 15:51:04: wafer stuck in chamber eenriquez at snf.stanford.edu
Shutdown pquest SNF 2012-09-04 12:49:46: broken wafer piece left inside jimkruger at snf.stanford.edu
- Shutdown pquest SNF 2012-09-04 12:49:46: broken wafer piece left inside eenriquez at snf.stanford.edu
Comment pquest SNF 2012-06-15 10:04:25: wet clean eenriquez at snf.stanford.edu
Comment pquest SNF 2012-09-21 10:49:20: wet clean mdickey at snf.stanford.edu
Problem pquest SNF 2012-09-21 23:09:18: wafer lost in the chamber zzp at snf.stanford.edu
- Problem pquest SNF 2012-09-21 23:09:18: wafer lost in the chamber cbaxter at snf.stanford.edu
Comment pquest SNF 2012-09-25 11:07:20: one of the port covers is missing gyama at snf.stanford.edu
Shutdown pquest SNF 2012-09-25 15:30:22: Wafer stuck in chamber derickson at snf.stanford.edu
- Shutdown pquest SNF 2012-09-25 15:30:22: Wafer stuck in chamber cbaxter at snf.stanford.edu
Problem pquest SNF 2012-09-26 12:15:14: Clamp making noise, seems "tilted" kgc at snf.stanford.edu
- Problem pquest SNF 2012-09-26 12:15:14: Clamp making noise, seems "tilted" eenriquez at snf.stanford.edu
Problem pquest SNF 2012-09-27 23:02:03: Process Pump Ready Shows Alarm robertchen at snf.stanford.edu
- Problem pquest SNF 2012-09-27 23:02:03: Process Pump Ready Shows Alarm eenriquez at snf.stanford.edu
Shutdown pquest SNF 2012-10-01 20:22:15: Wafer fell off while loading marina01 at snf.stanford.edu
- Shutdown pquest SNF 2012-10-01 20:22:15: Wafer fell off while loading mdickey at snf.stanford.edu
Shutdown pquest SNF 2012-10-03 09:08:30: Vacuum pump problem eenriquez at snf.stanford.edu
- Shutdown pquest SNF 2012-10-03 09:08:30: Vacuum pump problem eenriquez at snf.stanford.edu
Shutdown pquest SNF 2012-10-03 17:59:00: wafer fell off pins while loading, still in pquest bucklesm at snf.stanford.edu
- Shutdown pquest SNF 2012-10-03 17:59:00: wafer fell off pins while loading, still in pquest mdickey at snf.stanford.edu
Comment pquest SNF 2012-10-09 15:01:33: Ch4 is not available. eenriquez at snf.stanford.edu
- Comment pquest SNF 2012-10-09 15:01:33: Ch4 is not available. eenriquez at snf.stanford.edu
Comment pquest SNF 2012-10-15 14:35:26: Clamping noise derickson at snf.stanford.edu
- Comment pquest SNF 2012-10-15 14:35:26: Clamping noise cbaxter at snf.stanford.edu
Problem pquest SNF 2012-10-18 13:16:01: Clamp-down sensor needs adjustment jimkruger at snf.stanford.edu
- Problem pquest SNF 2012-10-18 13:16:01: Clamp-down sensor needs adjustment cbaxter at snf.stanford.edu
Comment pquest SNF 2012-04-16 09:02:35: Update ECR power problem eenriquez at snf.stanford.edu
Comment pquest SNF 2012-04-27 11:11:34: Update microwave generator eenriquez at snf.stanford.edu
Comment pquest SNF 2012-05-01 09:06:04: Added microwave turn on step to oxygen3 recipe eenriquez at snf.stanford.edu
Comment pquest SNF 2012-07-26 20:15:35: Fluorine time extended to Monday eenriquez at snf.stanford.edu
Comment pquest SNF 2012-07-30 08:05:01: wet clean eenriquez at snf.stanford.edu
Comment pquest SNF 2012-07-31 14:47:21: pen holder is a through hole now... eenriquez at snf.stanford.edu
Comment pquest SNF 2012-07-23 10:07:22: Software Issue eenriquez at snf.stanford.edu
Comment pquest SNF 2012-03-27 13:14:22: Plasma strikes Okay! eenriquez at snf.stanford.edu
Comment pquest SNF 2011-11-17 11:00:48: J Kruger's comments on unstable plasma eenriquez at snf.stanford.edu
Problem pquest SNF 2012-10-29 16:25:24: RF Power not working kgc at snf.stanford.edu
- Problem pquest SNF 2012-10-29 16:25:24: RF Power not working eenriquez at snf.stanford.edu
Problem pquest SNF 2012-10-29 17:06:55: RF Power Not Working? vijayn at snf.stanford.edu
- Problem pquest SNF 2012-10-29 17:06:55: RF Power Not Working? eenriquez at snf.stanford.edu
Shutdown pquest SNF 2012-10-30 06:00:24: RF Power is low mtang at snf.stanford.edu
- Shutdown pquest SNF 2012-10-30 06:00:24: RF Power is low eenriquez at snf.stanford.edu
Shutdown pquest SNF 2012-10-31 10:52:08: load arm problem eenriquez at snf.stanford.edu
- Shutdown pquest SNF 2012-10-31 10:52:08: load arm problem eenriquez at snf.stanford.edu
Shutdown pquest SNF 2012-11-08 21:19:18: Wafer broken inside luckys at snf.stanford.edu
- Shutdown pquest SNF 2012-11-08 21:19:18: Wafer broken inside mdickey at snf.stanford.edu
Comment pquest SNF 2012-11-10 08:07:41: Fluorine week extended to 11/19 mtang at snf.stanford.edu
Problem pquest SNF 2012-11-13 08:45:34: CF4 mdickey at snf.stanford.edu
- Problem pquest SNF 2012-11-13 08:45:34: CF4 cbaxter at snf.stanford.edu
Problem pquest SNF 2012-11-13 10:01:32: CF4 mdickey at snf.stanford.edu
- Problem pquest SNF 2012-11-13 10:01:32: CF4 cbaxter at snf.stanford.edu
Problem pquest SNF 2012-11-13 17:52:46: Al etch issues jimkruger at snf.stanford.edu
- Problem pquest SNF 2012-11-13 17:52:46: Al etch issues cbaxter at snf.stanford.edu
Shutdown pquest SNF 2012-11-15 19:51:52: broken wafer ouyang at snf.stanford.edu
- Shutdown pquest SNF 2012-11-15 19:51:52: broken wafer cbaxter at snf.stanford.edu
Shutdown pquest SNF 2012-11-18 23:51:36: wafer stuck inside maxms at snf.stanford.edu
- Shutdown pquest SNF 2012-11-18 23:51:36: wafer stuck inside mdickey at snf.stanford.edu
Problem pquest SNF 2012-12-03 14:15:13: incomplete strip faridz at snf.stanford.edu
- Problem pquest SNF 2012-12-03 14:15:13: incomplete strip vilanova at snf.stanford.edu
Problem pquest SNF 2012-12-07 15:29:15: unexpected errors marina01 at snf.stanford.edu
- Problem pquest SNF 2012-12-07 15:29:15: unexpected errors cbaxter at snf.stanford.edu
Problem pquest SNF 2012-12-10 22:21:20: chuck does not cool down wslee at snf.stanford.edu
- Problem pquest SNF 2012-12-10 22:21:20: chuck does not cool down eenriquez at snf.stanford.edu
Shutdown pquest SNF 2012-12-11 12:38:35: Light pen doesn't activate mtang at snf.stanford.edu
- Shutdown pquest SNF 2012-12-11 12:38:35: Light pen doesn't activate cbaxter at snf.stanford.edu
Comment pquest SNF 2012-12-11 16:15:02: ETA on light pen? wslee at snf.stanford.edu
- Comment pquest SNF 2012-12-11 16:15:02: ETA on light pen? cbaxter at snf.stanford.edu
Comment pquest SNF 2012-12-11 18:41:48: New light pen cbaxter at snf.stanford.edu
Shutdown pquest SNF 2012-12-12 16:19:38: wafer broken at loading zzp at snf.stanford.edu
- Shutdown pquest SNF 2012-12-12 16:19:38: wafer broken at loading eenriquez at snf.stanford.edu
Shutdown pquest SNF 2012-12-17 09:44:25: wafer clamp not working eenriquez at snf.stanford.edu
- Shutdown pquest SNF 2012-12-17 09:44:25: wafer clamp not working eenriquez at snf.stanford.edu
Problem Clear pquest: Purge panel ESO vavle was clodsed. booth at snf.stanford.edu
Problem pquest: qyuan at snf.stanford.edu
Problem Clear pquest: restarted turbo pump& unloaded wafer booth at snf.stanford.edu
Shutdown pquest: Turbopump not working pelton at snf.stanford.edu
Shutdown Clear pquest: restarted turbo again. booth at snf.stanford.edu
Problem Clear pquest: perhaps backside films fooled the wafer sensor? booth at snf.stanford.edu
Problem Clear pquest: check for enable LED's to be ON. booth at snf.stanford.edu
Shutdown pquest: rpu at snf.stanford.edu
- Shutdown pquest: rpu at snf.stanford.edu
Shutdown Clear pquest: booth at snf.stanford.edu
Problem Clear pquest: booth at snf.stanford.edu

Last message date: Fri Jan 11 13:09:19 PST 2013
Archived on: Fri Jan 11 13:09:37 PST 2013

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