From pelton at stanford.edu Fri Jun 1 12:43:42 2001 From: pelton at stanford.edu (Matthew A Pelton) Date: Fri, 1 Jun 2001 12:43:42 -0700 (PDT) Subject: Reservation of PlasmaQuest Message-ID: This is a reminder that I will be using the PlasmaQuest to do a one-time nitride deposition this weekend. Since this is not compatible with etches, I have reserved the machine for the entire weekend. I have also reserved it for Monday, so that Len can clean out the machine manually. It will be ready to use after the cleaning is finished, and it has pumped down. The first user after the cleaning should do an oxygen-plasma clean followed by a long dummy etch in order to condition the chamber. (Contact me if you don't know what this means.) Thanks for your understanding, -- Matt Pelton From booth at snf.stanford.edu Tue Jun 5 16:37:22 2001 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 05 Jun 2001 16:37:22 -0700 Subject: Plasma Quest status 06/05/01 Message-ID: <3B1D6D32.E31F635C@snf.stanford.edu> The Plasma Quest is still shutdown. When doing the chamber clean, I found that the quartz part which is mounted next to the microwave window in the chamber top, and provides uniform upper gas distribution, is badly eroded. I'm getting info on replacement parts - (I may get this info tomorrow), and will let everyone know what is to be expected. Len From booth at snf.stanford.edu Fri Jun 8 06:54:27 2001 From: booth at snf.stanford.edu (Len Booth) Date: Fri, 08 Jun 2001 06:54:27 -0700 Subject: Plasma Quest status 06/08/01 Message-ID: <3B20D913.D0A0D69B@snf.stanford.edu> Users - The badly eroded gas diffuser ring has been re-installed into the Pquest, to make it usable while a new ring is ordered (delivery will be about 3 weeks). Cesar installed it 180 deg offset from the original orientation on the ECR window, to minimize the nonuniform effect that the ring will have on gas flow across the ECR window. The next user needs to thoroughly season the chamber before attempting to get standard etch results. Len From jwynn at stanford.edu Thu Jun 21 12:35:38 2001 From: jwynn at stanford.edu (Janice Catherine Wynn) Date: Thu, 21 Jun 2001 12:35:38 -0700 (PDT) Subject: PQuest clamp sensor problem Message-ID: To PQuest users, I've had problems with the PlasmaQuest today, and thought perhaps someone would know what is wrong. (Len is gone until 7/1). I first ran a dummy wafer for 2 min. All seemed reasonable except the temp reading on the monitor went to 0.3C during the process, and then shot up to 38C when finished. The cooling mixture was stable at 20C and my temp was set to 25C in the recipe, so I thought it odd that it went sharply to 0C. I mention this because it may be related to the next problem.... The next time I loaded the dummy wafer, it loaded fine and the clamp came down. However, the program stopped on the step "Waiting for the Clamp Down Sensor." Eventually (almost waiting 10 min) I hit esc to stop it and unloaded the wafer. I tried 2 more times, always with the same problem (I tried cleaning the wafer before the 3rd try). Any suggestions for the temperature or the clamp problem? Thanks. My only idea is that the temp really did get low for some reason and the mixture condensed on the clamp sensor. I don't know if that's possible from the geometry. I will try to run it again later this afternoon after it's been pumping for awhile. Thanks for any comments, Janice Wynn --------------------- Janice C. Wynn Physics PhD Candidate Stanford University McCullough Bldg 018 Stanford, CA 94305 lab: (650) 723-4012 fax: (650) 725-2189 jwynn at stanford.edu --------------------- From scaccag at tiscalinet.it Thu Jun 21 15:31:57 2001 From: scaccag at tiscalinet.it (Luigi Scaccabarozzi) Date: Fri, 22 Jun 2001 00:31:57 +0200 Subject: PQuest clamp sensor problem References: Message-ID: <004601c0faa1$fba2c100$f0471e97@gigi> Hi Janice, about the temperature, did you check the cooling system set temperature? It may have been set at very low temperature, and the jump to high temperature may be due to wrong reading, sometimes it happens. About the clamp down sensor, most probably it is due to incorrect calibration of the sensor. Waiting for recalibration, usually just pushing gently the sensor with your finger will make it "sense" the correct position. You can see the sensor just under the chamber, as a small motor and 3 light sources. You can see it moving when loading or unloading. I showed it once to Matt, so you can also speak with him. I don't think these pronblems are related to sticking wafers, but I may be wrong. Hope this will help, good luck Gigi ----- Original Message ----- From: "Janice Catherine Wynn" To: Sent: Thursday, June 21, 2001 9:35 PM Subject: PQuest clamp sensor problem > To PQuest users, > > I've had problems with the PlasmaQuest today, and thought perhaps someone > would know what is wrong. (Len is gone until 7/1). > > I first ran a dummy wafer for 2 min. All seemed reasonable except the > temp reading on the monitor went to 0.3C during the process, and then shot > up to 38C when finished. The cooling mixture was stable at 20C and my > temp was set to 25C in the recipe, so I thought it odd that it went > sharply to 0C. I mention this because it may be related to the next > problem.... > > The next time I loaded the dummy wafer, it loaded fine and the clamp came > down. However, the program stopped on the step "Waiting for the Clamp > Down Sensor." Eventually (almost waiting 10 min) I hit esc to stop it and > unloaded the wafer. I tried 2 more times, always with the same problem (I > tried cleaning the wafer before the 3rd try). > > Any suggestions for the temperature or the clamp problem? Thanks. > > My only idea is that the temp really did get low for some reason and the > mixture condensed on the clamp sensor. I don't know if that's possible > from the geometry. I will try to run it again later this afternoon after > it's been pumping for awhile. > > Thanks for any comments, > Janice Wynn > > --------------------- > Janice C. Wynn > Physics PhD Candidate > > Stanford University > McCullough Bldg 018 > Stanford, CA 94305 > > lab: (650) 723-4012 > fax: (650) 725-2189 > jwynn at stanford.edu > --------------------- >