Plasma Quest status 06/08/01
booth at snf.stanford.edu
Fri Jun 8 06:54:27 PDT 2001
The badly eroded gas diffuser ring has been
re-installed into the Pquest, to make it usable while
a new ring is ordered (delivery will be about 3 weeks).
Cesar installed it 180 deg offset from the original
orientation on the ECR window, to minimize the nonuniform
effect that the ring will have on gas flow across the
The next user needs to thoroughly season the
chamber before attempting to get standard etch results.
More information about the pquest