From shott at snf.stanford.edu Tue Mar 13 15:50:01 2001 From: shott at snf.stanford.edu (John Shott) Date: Tue, 13 Mar 2001 15:50:01 -0800 Subject: Problems with pquest mailing list ... Message-ID: <3AAEB229.9CF315CE@snf.stanford.edu> Plasma Quest Users: For some time, as many of you are painfully aware, the pquest at snf.stanford.edu mailing list hasn't worked. I've looked previously for the problem ... and been unable to spot it. Thanks to encouragement from Matt Pelton, I took another look ... and finally found the problem. Well, if you receive this message, I found the problem ... It turns out that in an obscure configuration file, there was a one-letter typographical error when we set up this list ... and it took me a long time to see this. I apologize for the inconvenience ... and will look forward to seeing the interesting and informative discussion that ensues on this list. Happy e-mailing, John From pelton at stanford.edu Tue Mar 13 20:17:05 2001 From: pelton at stanford.edu (Matthew A Pelton) Date: Tue, 13 Mar 2001 20:17:05 -0800 (PST) Subject: Problems with pquest mailing list ... In-Reply-To: <3AAEB229.9CF315CE@snf.stanford.edu> Message-ID: To follow up on this, the PlasmaQuest is up and running. I did several etches today, and everything seems to be good. Be careful, though. Also note that the offsets have been fixed for gas flow and chamber pressure reading; this may change your etch somewhat. -- Matt From booth at snf.stanford.edu Thu Mar 15 09:36:41 2001 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 15 Mar 2001 09:36:41 -0800 Subject: Plasma Quest status 03/15/01 Message-ID: <3AB0FDA9.5DF4F181@snf.stanford.edu> Last nite Cesar removed a leaky ferrofluidic feedthrough that is part of the wafer clamping assembly. There are no replacement parts available locally, but I did find one on the east coast. It will be shipped overnight, so we expect it to arrive tomorrow, Friday March 16th. If if does arrive, then Cesar can install it & test for leaks Friday night. Len From pelton at stanford.edu Thu Mar 22 13:43:51 2001 From: pelton at stanford.edu (Matthew A Pelton) Date: Thu, 22 Mar 2001 13:43:51 -0800 (PST) Subject: Nitride testing Message-ID: As I mentioned in an e-mail to most of you before, I would like to test out nitride deposition in the PlasmaQuest. Since nobody has objected, here's my plan. On Friday, Len will open the machine and wipe down the walls, so that they're clean to start with. The chamber will pump down overnight. Over the weekend, I will do several test depositions of thick nitride layers, with cleaning plasmas run afterwards, as I would if I were doing real depositions. I will run test etches of GaAs both before and after the nitride runs, to make sure the etch conditions are the same, looking in particular at etch rates, cleanliness, and sidewall quality. On Monday, Len will reopen the chamber and look at the walls to see whether they are clean. The system will then have to pump down for a while again before it is usable. This means that I will be dominating the machine for a few days. If anybody has objections to this, please let me know, and I will reschedule. I chose the weekend because I think it will cause the least overall inconvenience, but I am (somewhat) flexible. Also, if anybody has suggestions about the test processes, that would also be appreciated. Thanks, -- Matt Pelton From gigi at snow.stanford.edu Fri Mar 23 19:14:59 2001 From: gigi at snow.stanford.edu (Luigi Scaccabarozzi) Date: Fri, 23 Mar 2001 19:14:59 -0800 (PST) Subject: Cl2 offset Message-ID: Hi all, today Len and I corrected the Cl2 offset. Now what you read is (should be, at least) what you get, BUT there is an offset of 2.5 sccm, so if you want to get 1.5 sccm you have to set 4 sccm (1.5+2.5). Also, I think that until now, any value set below 2.5 was equivalent to a flow of 0 sccm... so if your recipes were good until now, just put Cl2=0. Please let us know if what we think is correct, or if you find any problem with the offset. Thanks Gigi