gigi at snow.stanford.edu
Fri Mar 23 19:14:59 PST 2001
today Len and I corrected the Cl2 offset. Now what you read is (should be,
at least) what you get, BUT there is an offset of 2.5 sccm, so if you want
to get 1.5 sccm you have to set 4 sccm (1.5+2.5).
Also, I think that until now, any value set below 2.5 was equivalent to a
flow of 0 sccm... so if your recipes were good until now, just put Cl2=0.
Please let us know if what we think is correct, or if you find any problem
with the offset.
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