Nitride Deposition

Jim McVittie mcvittie at stanford.edu
Thu Nov 8 13:52:45 PST 2001


PQuest Users,

I want to find out if there is any objections to letting Karen Seaward
of Agilent Labs do a few Nitride PECVD runs in the  PQuest next week.
She will be responsible for cleaning and seasoning the chamber after she

is finished. Karen has helped me out a few times in the past and I would

like to return the favor.

    Jim McVittie
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