From booth at snf.stanford.edu  Wed Sep  5 13:43:29 2001
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 05 Sep 2001 13:43:29 -0700
Subject: HBr gas is not available at this time.
Message-ID: <3B968E71.BDC82039@snf.stanford.edu>

Users -
	The HBr gas line to LAMpoly, Pquest, & P5000 (silicon)
is being checked.  The earliest that it may be back on-line
would be tomorrow morning (depending on the results of an
overnight test).	Len


From booth at snf.stanford.edu  Thu Sep  6 10:31:49 2001
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 06 Sep 2001 10:31:49 -0700
Subject: HBr is available again
Message-ID: <3B97B305.47AEE51@snf.stanford.edu>

Users -
	Checks of the HBr gas system indicate that
there are no current problems, and it is OK to 
use this gas in the 
	LAMpoly
	Pquest
	P5000etch
etchers again.  I am clearing the shutdowns on
these tools now.	Len