HBr is available again

Len Booth booth at snf.stanford.edu
Thu Sep 6 10:31:49 PDT 2001


Users -
	Checks of the HBr gas system indicate that
there are no current problems, and it is OK to 
use this gas in the 
	LAMpoly
	Pquest
	P5000etch
etchers again.  I am clearing the shutdowns on
these tools now.	Len



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