Pquest status July 2,2002

Len Booth booth at snf.stanford.edu
Tue Jul 2 15:52:09 PDT 2002

Parts arrived today, and I've replaced the bad 
chuck heater wires, and replaced the leaking
cooling lines, so I will start to re-install
the chuck into the pquest chamber tomorrow
morning, then assemble the wafer clamping
A new part for the loadlock also arrived,
which I'll install after the etch chamber is
is back under vacuum.

More information about the pquest mailing list