Pquest status July 2,2002

Len Booth booth at snf.stanford.edu
Tue Jul 2 15:52:09 PDT 2002


Parts arrived today, and I've replaced the bad 
chuck heater wires, and replaced the leaking
cooling lines, so I will start to re-install
the chuck into the pquest chamber tomorrow
morning, then assemble the wafer clamping
mechanism.
A new part for the loadlock also arrived,
which I'll install after the etch chamber is
is back under vacuum.
			Len



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