diagnostic etch wafers and processes

Yi Dong YDong at sirostech.com
Wed Jul 17 15:01:07 PDT 2002

  Hi Vijit and true,

  I think your opinion is very important! I tracking the 
  GaAs etching rate some time before and reported to Jim the
  Problem according to the GaAs etching results. Here is the
  Problem I reported before PQuest done.
  "The etching rate I calculated from April 3 to May 3, it 
  around about ~2000A/min. From May 14 to May 22, I calculate 
  GaAs etching rate near 1750A/min. At June 3, I got only 1360A/min 
  for GaAs etch and also 4" dummy silicon wafer was coated with blue 
  color!" So maybe we need make an etching rate tracking notebook for
  everyone check the equipment status?
  Best regards,
  Yi Dong
 Process Development Engineer
 Siros Technologies
 101 Daggett Drive
 San Jose, CA. 95134
 Phone: 408-474-3303
 Fax: 408-954-9300
 ydong at sirostech.com

-----Original Message-----
From: Vijit Sabnis [mailto:vsabnis at snowmass.Stanford.EDU]
Sent: Wednesday, July 17, 2002 10:16 AM
To: true at snf.stanford.edu
Cc: pquest at snf.stanford.edu; mcvittie at snf.stanford.edu;
rcrane at snf.stanford.edu
Subject: Re: diagnostic etch wafers and processes


I think Randy's suggestion is a good one.  GaAs and InP
are the most commonly used materials etched in the pquest, so
I think that they should be used to track the performance of the
pquest over time.  Si will not normally be etched in the 
Cl2/BCl3/Ar chemistries so we should stick with GaAs/InP despite
the cost.

- vijit 

> Pquest Users,
> I'd like to get some feedback on a proposal. The proposal is to define
> standard wafers and etch process to use as a diagnostic for the Pquest.
> Then when the tool comes back up after a shutdown or when problems are
> suspected , one of these wafers can be etched and parameters such as the
> bias voltage and etch rate can be recorded. This data can then be
> tracked over time so that if a users starts thinking that his particular
> etch process (on his particular wafers) is deviating, at least we can
> determine whether the standard etch process is behaving as expected.
> So, I'm asking the pquest users for suggestions on what to use as the
> standard wafers and etch recipe. Is a GaAs etch the most common? Would
> it be feasible to substitue cheaper Si wafers for GaAs?
> Thanks,
> Randy True

Vijit Sabnis
vsabnis at snow.stanford.edu
Stanford University
Department of Electrical Engineering
Solid State and Photonics Laboratory
CISX B113-23
650/725-2774 office
    723-4659 fax
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