diagnostic etch wafers and processes
YDong at sirostech.com
Wed Jul 17 15:01:07 PDT 2002
Hi Vijit and true,
I think your opinion is very important! I tracking the
GaAs etching rate some time before and reported to Jim the
Problem according to the GaAs etching results. Here is the
Problem I reported before PQuest done.
"The etching rate I calculated from April 3 to May 3, it
around about ~2000A/min. From May 14 to May 22, I calculate
GaAs etching rate near 1750A/min. At June 3, I got only 1360A/min
for GaAs etch and also 4" dummy silicon wafer was coated with blue
color!" So maybe we need make an etching rate tracking notebook for
everyone check the equipment status?
Process Development Engineer
101 Daggett Drive
San Jose, CA. 95134
ydong at sirostech.com
From: Vijit Sabnis [mailto:vsabnis at snowmass.Stanford.EDU]
Sent: Wednesday, July 17, 2002 10:16 AM
To: true at snf.stanford.edu
Cc: pquest at snf.stanford.edu; mcvittie at snf.stanford.edu;
rcrane at snf.stanford.edu
Subject: Re: diagnostic etch wafers and processes
I think Randy's suggestion is a good one. GaAs and InP
are the most commonly used materials etched in the pquest, so
I think that they should be used to track the performance of the
pquest over time. Si will not normally be etched in the
Cl2/BCl3/Ar chemistries so we should stick with GaAs/InP despite
> Pquest Users,
> I'd like to get some feedback on a proposal. The proposal is to define
> standard wafers and etch process to use as a diagnostic for the Pquest.
> Then when the tool comes back up after a shutdown or when problems are
> suspected , one of these wafers can be etched and parameters such as the
> bias voltage and etch rate can be recorded. This data can then be
> tracked over time so that if a users starts thinking that his particular
> etch process (on his particular wafers) is deviating, at least we can
> determine whether the standard etch process is behaving as expected.
> So, I'm asking the pquest users for suggestions on what to use as the
> standard wafers and etch recipe. Is a GaAs etch the most common? Would
> it be feasible to substitue cheaper Si wafers for GaAs?
> Randy True
vsabnis at snow.stanford.edu
Department of Electrical Engineering
Solid State and Photonics Laboratory
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