etch summary

Randy True true at snf.stanford.edu
Tue Jul 30 17:08:27 PDT 2002


Here is a summary of the etches done since the etcher came back up last
Thurs:

> PQuest Etches
>
> Date & Time     User    Recipe                  Material        Brown?  Temp    Bias    Etch Rate
> 7/25 4pm        true    Ar=40,O2=20             Dummy Si        No      0 C
>                         Ar=40,O2=20             Polyimide       No      0 C     150 V   Normal, >5000A/min
> 7/25 9pm        sabnis  O2                      Carrier         NA      85 C
>                         Ar=15,BCL3=10,CL2=3     Carrier         Brown   85 C
>                         Ar=15,BCL3=10,CL2=3     InP             Brown   85 C            10% of Normal, 250A/min
> 7/26 3pm        gigi    O2                      Dummy Si        NA      5 C
>                         Ar=15,BCL3=10,CL2=2     Dummy Si        No      5 C
>                         Ar=15,BCL3=10,CL2=2     GaAs            No      5 C             Normal, 1000A/min
> 7/27 2pm        sabnis  O2                      Carrier         No      25 C
>                         Ar=15,BCL3=10,CL2=3     Carrier         No      25 C
>                         Ar=15,BCL3=10,CL2=3     InP             No      25 C            Normal, 330A/min
>                         Ar=15,BCL3=10,CL2=3     InP             No      25 C            Normal, 260A/min
>                         Ar=15,BCL3=10,CL2=3     Carrier         No      85 C
>                         Ar=15,BCL3=10,CL2=3     InP             Brown   85 C    50 V    10% of Normal, 260A/min
>                         Ar=15,BCL3=10,CL2=3     InP             Brown   85 C    50 V    10% of Normal, 290A/min
>                         Ar=15,BCL3=20,CL2=6     InP             Brown   85 C    55 V    10% of Normal, 265A/min
>
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