PQ working right now

Yi Dong dongyi at snf.stanford.edu
Thu May 2 14:17:53 PDT 2002


All,

I start runing this equipment this morning and did condition clean twice.
I run my three lots real sample and got average etching rate of GAAs about
2030A/min. It looks good right now.

Thanks,

Yi Dong
Process Engineer
Siros Technologies

Tel:408-4743303   




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