Pquest status 05/09/02

[Len Booth]

Plasma Quest users -
	The Pquest is currently shutdown.
The dummy wafer broke inside the etch chamber
on Tuesday, and while cleaning up the chamber,
I found that the quartz gas distribution ring
and the quartz microwave window were severely
etched.  I have a new quartz gas distribution
ring ready to install, but am waiting for a
new quartz microwave window to arrive.  It
has been ordered with overnight delivery requested,
and should arrive here tomorrow, Friday 5/10.

Best estimate for when the machine will be
available for process, is Monday.
		Len