Pquest status 05/09/02

Len Booth booth at snf.stanford.edu
Thu May 9 09:58:57 PDT 2002


Plasma Quest users -
	The Pquest is currently shutdown.
The dummy wafer broke inside the etch chamber
on Tuesday, and while cleaning up the chamber,
I found that the quartz gas distribution ring
and the quartz microwave window were severely
etched.  I have a new quartz gas distribution
ring ready to install, but am waiting for a
new quartz microwave window to arrive.  It
has been ordered with overnight delivery requested,
and should arrive here tomorrow, Friday 5/10.

Best estimate for when the machine will be
available for process, is Monday.
		Len



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