Pquest status 05/09/02
booth at snf.stanford.edu
Thu May 9 09:58:57 PDT 2002
Plasma Quest users -
The Pquest is currently shutdown.
The dummy wafer broke inside the etch chamber
on Tuesday, and while cleaning up the chamber,
I found that the quartz gas distribution ring
and the quartz microwave window were severely
etched. I have a new quartz gas distribution
ring ready to install, but am waiting for a
new quartz microwave window to arrive. It
has been ordered with overnight delivery requested,
and should arrive here tomorrow, Friday 5/10.
Best estimate for when the machine will be
available for process, is Monday.
More information about the pquest