From cbaxter at snf.stanford.edu Wed Sep 4 22:52:46 2002 From: cbaxter at snf.stanford.edu (Cesar Baxter) Date: Wed, 04 Sep 2002 22:52:46 -0700 Subject: PQuest Message-ID: <3D76F12E.E50562AF@snf.stanford.edu> To All User, I installed a new vespel pin and tested transport. I ran 30mins O2 plasma, chamber still need to be condition before running any recipe. Cesar From booth at snf.stanford.edu Mon Sep 16 08:35:27 2002 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 16 Sep 2002 08:35:27 -0700 Subject: one day shutdown Message-ID: <3D85FA3F.F79C4F93@snf.stanford.edu> Electrical upgrades will be made in the basement this week on Wednesday 9/18. This will require the shutdown of the following lab equipment for the day, so I have reserved them for the hours of 0600 to 1800 : Innotec MRC etcher P5000etch Plasma Quest Len