PQuest Process Info Request

Jim McVittie mcvittie at snf.stanford.edu
Wed Jul 2 22:09:12 PDT 2003


PQuest Users,

I would to get a handle on all the processes being run on the PQuest
etcher. Please fill out the following questionnaire for any process you
have previously run on the PQuest and want to run in the future. Please
return this info to me in the next week. I will try to get a copy of all
the processes put into the back of the log book.

    Thanks,   Jim McVittie


Name:________________________  Group/Company:_________________________

Email address: ____________________    Date:__________________________

Process name: ____________________  Material to be etched:____________

Chamber condition procedure:

  Step 1
  Top Power______W,   Bottom Power_______W,   Pressure____________mT

  Gases and flows_________________________    Plasma time________min

  Step 2
  Top Power______W,   Bottom Power_______W,   Pressure____________mT

  Gases and flows_________________________    Plasma time________min

  Comments:__________________________________________________________

  ___________________________________________________________________


Etch Process:
  Sample size_________,  Mask Mat'l___________, Carrier__________

  Step 1
  Top Power______W,   Bottom Power_______W,   Pressure____________mT

  Gases and flows___________________________________________________

  Temperature ______C, Bias voltage______V, Plasma time _________sec

  Step 2
  Top Power______W,   Bottom Power_______W,   Pressure____________mT

  Gases and flows___________________________________________________

  Temperature ______C, Bias voltage______V, Plasma time _________sec

  Step 3
  Top Power______W,   Bottom Power_______W,   Pressure____________mT

  Gases and flows___________________________________________________

Comment on rates, selectivity and on how well this process works:
________________

_________________________________________________________________

_________________________________________________________________
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