PQuest Process Form should filled out in full

Jim McVittie mcvittie at snf.stanford.edu
Wed Jul 9 22:19:50 PDT 2003


PQuest Users,

I am senting out the process form again since some of you seem to have
loss it. I expect the form to be filled out in FULL including the
results section. Unless you are away and have contacted me, incomplete
form do not count.

    Thanks,   Jim McVittie


Name:________________________  Group/Company:_________________________

Email address: ____________________    Date:__________________________

Process name: ____________________  Material to be etched:____________

Chamber condition procedure:

  Step 1
  Top Power______W,   Bottom Power_______W,   Pressure____________mT

  Gases and flows_________________________    Plasma time________min

  Step 2
  Top Power______W,   Bottom Power_______W,   Pressure____________mT

  Gases and flows_________________________    Plasma time________min

  Comments:__________________________________________________________

  ___________________________________________________________________


Etch Process:
  Sample size_________,  Mask Mat'l___________, Carrier__________

  Step 1
  Top Power______W,   Bottom Power_______W,   Pressure____________mT

  Gases and flows___________________________________________________

  Temperature ______C, Bias voltage______V, Plasma time _________sec

  Step 2
  Top Power______W,   Bottom Power_______W,   Pressure____________mT

  Gases and flows___________________________________________________

  Temperature ______C, Bias voltage______V, Plasma time _________sec

  Step 3
  Top Power______W,   Bottom Power_______W,   Pressure____________mT

  Gases and flows___________________________________________________

Comment on rates, selectivity and on how well this process works:
________________

_________________________________________________________________

_________________________________________________________________




-------------- next part --------------
A non-text attachment was scrubbed...
Name: mcvittie.vcf
Type: text/x-vcard
Size: 422 bytes
Desc: Card for Jim McVittie
URL: <http://snf.stanford.edu/pipermail/pquest/attachments/20030709/9311dffc/attachment.vcf>


More information about the pquest mailing list