PQuest Process Form should filled out in full

[Jim McVittie]

PQuest Users,

I am senting out the process form again since some of you seem to have
loss it. I expect the form to be filled out in FULL including the
results section. Unless you are away and have contacted me, incomplete
form do not count.

    Thanks,   Jim McVittie


Name:________________________  Group/Company:_________________________

Email address: ____________________    Date:__________________________

Process name: ____________________  Material to be etched:____________

Chamber condition procedure:

  Step 1
  Top Power______W,   Bottom Power_______W,   Pressure____________mT

  Gases and flows_________________________    Plasma time________min

  Step 2
  Top Power______W,   Bottom Power_______W,   Pressure____________mT

  Gases and flows_________________________    Plasma time________min

  Comments:__________________________________________________________

  ___________________________________________________________________


Etch Process:
  Sample size_________,  Mask Mat'l___________, Carrier__________

  Step 1
  Top Power______W,   Bottom Power_______W,   Pressure____________mT

  Gases and flows___________________________________________________

  Temperature ______C, Bias voltage______V, Plasma time _________sec

  Step 2
  Top Power______W,   Bottom Power_______W,   Pressure____________mT

  Gases and flows___________________________________________________

  Temperature ______C, Bias voltage______V, Plasma time _________sec

  Step 3
  Top Power______W,   Bottom Power_______W,   Pressure____________mT

  Gases and flows___________________________________________________

Comment on rates, selectivity and on how well this process works:
________________

_________________________________________________________________

_________________________________________________________________




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