Draft of GaAs Etch Processes

Jim McVittie mcvittie at snf.stanford.edu
Thu Jul 17 17:18:43 PDT 2003


PQuest Users,

I am back from a short vacation. Attached is an Excel file with the GaAs
Processes that were sent to me. If you sent me a GaAs process, please
read this over. Please send me any corrections or missing info. I will
try and get to the Non-GaAs process tomorrow.

    Jim
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