Pquest Maintenance downtime
Len Booth
booth at snf.stanford.edu
Fri Jul 25 13:44:56 PDT 2003
Pquest Users -
I have reserved prime time next Wednesday July 30
from 0700 thru 1800, to remove & repair some screws in the
LoadLock assembly. The necessary machine work and
reinstallation and alignment of the load arm & wafer
transfer should take much less time than I have
reserved. If the machine is ready earlier than 1800
I will remove the remaining reservation.
Len
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