etching GaN

Hung-Tao Chou hungtao at stanford.edu
Tue Sep 9 16:39:12 PDT 2003


Hi!

I tried to etch GaN by the PQuest but couldnt etch it at all. Does anyone 
has tried to etch GaN in CIS or has any recipe on using the PQuest to etch 
GaN?  

Best Wishes,

Hungtao





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