microwave reflected power problem

Mark Wistey wistey at snowmass.Stanford.EDU
Mon Sep 29 02:04:57 PDT 2003

Chongfei (and others) -

What power are you using, and what gasses and pressures?  Gigi's
trick is to use a 60sec step at 400W, then hit cancel ("End Step")
as soon as the plasma lights.  It does seem harder to light the plasma
now than earlier this year; usually I have to turn the bottom knob
sharply clockwise, then back to counterclockwise after the plasma

Please let the rest of us know if it keeps getting worse...

 - Mark

More information about the pquest mailing list