microwave reflected power problem
Mark Wistey
wistey at snowmass.Stanford.EDU
Mon Sep 29 02:04:57 PDT 2003
Chongfei (and others) -
What power are you using, and what gasses and pressures? Gigi's
trick is to use a 60sec step at 400W, then hit cancel ("End Step")
as soon as the plasma lights. It does seem harder to light the plasma
now than earlier this year; usually I have to turn the bottom knob
sharply clockwise, then back to counterclockwise after the plasma
lights.
Please let the rest of us know if it keeps getting worse...
- Mark
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