From alirezaa at stanford.edu Tue Mar 1 11:30:04 2005 From: alirezaa at stanford.edu (Alireza Khalili) Date: Tue, 01 Mar 2005 11:30:04 -0800 Subject: PQuest monitor In-Reply-To: <20050211191235.85539.qmail@web40908.mail.yahoo.com> References: <20050211191235.85539.qmail@web40908.mail.yahoo.com> Message-ID: <6.2.1.2.2.20050301112129.0289bf70@alirezaa.pobox.stanford.edu> whoever uses the laser monitor setup on the pquest, you do not need to put the voltmeter in my bin after you're done... it may hit/break my samples. just leave it where it is under the laptop. much thanks, --Ali From Luca.Plattner at hitachigst.com Tue Mar 1 11:53:07 2005 From: Luca.Plattner at hitachigst.com (Luca.Plattner at hitachigst.com) Date: Tue, 1 Mar 2005 11:53:07 -0800 Subject: PQuest status Message-ID: Dear PQuest users As an industrial user of the SNF facility I am not able to monitor the performance of the tool as easily as some of you may be. Last time I used it, 2/11/05, I noticed that the backside He cooling gas flow had been rising sharply for some days. Does anyone know whether the tool is currently operating properly? Also, is anyone willing to show me how to use the laser monitor and explain its capabilities? Please. Thank you, Luca ____________________________________________ Luca Plattner, Ph.D. San Jose Research Center Hitachi Global Storage Technologies 650 Harry Road San Jose, CA 95120 phone +1 408 323 7432 fax +1 408 323 7010 email luca.plattner at hitachigst.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From scaccag at stanford.edu Tue Mar 1 13:30:05 2005 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Tue, 1 Mar 2005 13:30:05 -0800 (PST) Subject: pquest down Message-ID: Hi all, we just found a big leak in pquest, which explains some of the weird behaviors seen in the past few days (etch rate increased, ...). Elmer is taking care of it. Gigi From Luca.Plattner at hitachigst.com Fri Mar 11 12:25:28 2005 From: Luca.Plattner at hitachigst.com (Luca.Plattner at hitachigst.com) Date: Fri, 11 Mar 2005 12:25:28 -0800 Subject: PQuest Message-ID: Hi Could anyone let me know whether the PQuest is now up? I do not have Elmer's number - Gigi said he was taking care of the leak - and do not understand the situation from the remote Coral: people have been using the tool but the status summary still indicates a problem and shutdown. Can you shed some light on this matter? Cheers, Luca ____________________________________________ Luca Plattner, Ph.D. San Jose Research Center Hitachi Global Storage Technologies 650 Harry Road San Jose, CA 95120 phone +1 408 323 7432 fax +1 408 323 7010 email luca.plattner at hitachigst.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From scaccag at stanford.edu Fri Mar 11 13:00:20 2005 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Fri, 11 Mar 2005 13:00:20 -0800 (PST) Subject: PQuest In-Reply-To: Message-ID: HI Luca, the pquest is in green mode, and it has been in this state for quite a while now. I'm not sure what do you mean. Last time I heard of it, a couple of days ago, everything was fine, although I found a slightly higher etch rate. Gigi PS: I don't if someone replied you about the etch monitor. I can show it you next time, if you still need On Fri, 11 Mar 2005 Luca.Plattner at hitachigst.com wrote: > Hi > > Could anyone let me know whether the PQuest is now up? I do not have > Elmer's number - Gigi said he was taking care of the leak - and do not > understand the situation from the remote Coral: people have been using the > tool but the status summary still indicates a problem and shutdown. Can > you shed some light on this matter? > > Cheers, > Luca > ____________________________________________ > Luca Plattner, Ph.D. > San Jose Research Center > Hitachi Global Storage Technologies > 650 Harry Road > San Jose, CA 95120 > phone +1 408 323 7432 > fax +1 408 323 7010 > email luca.plattner at hitachigst.com From scaccag at stanford.edu Wed Mar 16 23:18:50 2005 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Wed, 16 Mar 2005 23:18:50 -0800 (PST) Subject: leak Message-ID: HI, I run the leak-check and the pressure rose up to 3 mTorr in 1 minute (usually 1 mTorr). Also the ECR power at some point dropped to 2/3 of the requested value, also a symptom of a leak. I reported the problem on coral... The machine is usable, you may etch with some air in addition to your gases... Gigi From scaccag at stanford.edu Thu Mar 17 00:23:40 2005 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Thu, 17 Mar 2005 00:23:40 -0800 (PST) Subject: IGNORE LEAK PROBLEM EMAIL! In-Reply-To: Message-ID: Sorry, I unloaded and loaded my wafer and the problem disappeared. Maybe it had to do with my wafer, not with machine... I'll keep an eye on it... Gigi On Wed, 16 Mar 2005, Luigi Scaccabarozzi wrote: > HI, > I run the leak-check and the pressure rose up to 3 mTorr in 1 minute > (usually 1 mTorr). Also the ECR power at some point dropped to 2/3 of the > requested value, also a symptom of a leak. > I reported the problem on coral... > The machine is usable, you may etch with some air in addition to your > gases... > Gigi > From mcvittie at snf.stanford.edu Thu Mar 17 09:19:21 2005 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Thu, 17 Mar 2005 09:19:21 -0800 Subject: leak References: Message-ID: <4239BC19.C26EF26A@snf.stanford.edu> Gigi, The PQuest chamber has a volume of 75 liters. With this vol a leak rate of 3mT/min is equal to a 0.3 sccm flow rate of air or 0.06 sccm of O2 into the system. I am not sure exactly what leak rate would affect you process. Your BCL3 flow of 10 sccm will most likely remove most of the O2 and H2O from the chamber. Jim Luigi Scaccabarozzi wrote: > HI, > I run the leak-check and the pressure rose up to 3 mTorr in 1 minute > (usually 1 mTorr). Also the ECR power at some point dropped to 2/3 of the > requested value, also a symptom of a leak. > I reported the problem on coral... > The machine is usable, you may etch with some air in addition to your > gases... > Gigi -------------- next part -------------- A non-text attachment was scrubbed... Name: mcvittie.vcf Type: text/x-vcard Size: 422 bytes Desc: Card for Jim McVittie URL: From mcvittie at cis.Stanford.EDU Tue Mar 22 13:07:04 2005 From: mcvittie at cis.Stanford.EDU (Jim McVittie) Date: Tue, 22 Mar 2005 13:07:04 -0800 (PST) Subject: Help with Training Message-ID: PQuest Users, Ho Yeol Cho is a Saraswat student and wants to get trained on the Pquest to etch GaAS and GaAlAs. I am looking for a current user to train him. Thanks, Jim From jimkruger at yahoo.com Thu Mar 24 17:58:24 2005 From: jimkruger at yahoo.com (jim kruger) Date: Thu, 24 Mar 2005 17:58:24 -0800 (PST) Subject: Laser DVM battery changed--be careful of the back light feature Message-ID: <20050325015824.30427.qmail@web40903.mail.yahoo.com> With the help of zlrao, the battery in the DVM used with the laser endpoint has been changed. (It is a standard 9 volt). Concerns have been expressed that the battery life seems shorter of late. I had not been aware of it, but today I noticed that the DVM has a back light feature (button labled B/L) which I'm sure is the dominant drain on battery life if activated. Be sure the B/L button is off. It lights the display even when the DVM is off. jimkruger __________________________________ Do you Yahoo!? Yahoo! Small Business - Try our new resources site! http://smallbusiness.yahoo.com/resources/