scaccag at stanford.edu
Fri Mar 11 13:00:20 PST 2005
the pquest is in green mode, and it has been in this state for quite a
while now. I'm not sure what do you mean.
Last time I heard of it, a couple of days ago, everything was fine,
although I found a slightly higher etch rate.
PS: I don't if someone replied you about the etch monitor. I can show it
you next time, if you still need
On Fri, 11 Mar 2005 Luca.Plattner at hitachigst.com wrote:
> Could anyone let me know whether the PQuest is now up? I do not have
> Elmer's number - Gigi said he was taking care of the leak - and do not
> understand the situation from the remote Coral: people have been using the
> tool but the status summary still indicates a problem and shutdown. Can
> you shed some light on this matter?
> Luca Plattner, Ph.D.
> San Jose Research Center
> Hitachi Global Storage Technologies
> 650 Harry Road
> San Jose, CA 95120
> phone +1 408 323 7432
> fax +1 408 323 7010
> email luca.plattner at hitachigst.com
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