leak

Luigi Scaccabarozzi scaccag at stanford.edu
Wed Mar 16 23:18:50 PST 2005


HI,
I run the leak-check and the pressure rose up to 3 mTorr in 1 minute
(usually 1 mTorr). Also the ECR power at some point dropped to 2/3 of the
requested value, also a symptom of a leak.
I reported the problem on coral...
The machine is usable, you may etch with some air in addition to your
gases...
Gigi




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