IGNORE LEAK PROBLEM EMAIL!

Luigi Scaccabarozzi scaccag at stanford.edu
Thu Mar 17 00:23:40 PST 2005


Sorry,
I unloaded and loaded my wafer and the problem disappeared. Maybe it had
to do with my wafer, not with machine...
I'll keep an eye on it...
Gigi

On Wed, 16 Mar 2005, Luigi Scaccabarozzi wrote:

> HI,
> I run the leak-check and the pressure rose up to 3 mTorr in 1 minute
> (usually 1 mTorr). Also the ECR power at some point dropped to 2/3 of the
> requested value, also a symptom of a leak.
> I reported the problem on coral...
> The machine is usable, you may etch with some air in addition to your
> gases...
> Gigi
>




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