From cmfaulkn at snf.stanford.edu  Tue May 10 14:02:16 2005
From: cmfaulkn at snf.stanford.edu (Carl Faulkner)
Date: Tue, 10 May 2005 14:02:16 -0700 (PDT)
Subject: free 3p-7p today
Message-ID: <Pine.LNX.4.04.10505101401420.24770-100000@snf.stanford.edu>




From yamanaka at snowmass.stanford.edu  Thu May 12 10:39:05 2005
From: yamanaka at snowmass.stanford.edu (Kazuhiko Yamanaka)
Date: Thu, 12 May 2005 10:39:05 -0700
Subject: Pquest free 11am-12:30pm today
In-Reply-To: <Pine.LNX.4.04.10505101401420.24770-100000@snf.stanford.edu>
References: <Pine.LNX.4.04.10505101401420.24770-100000@snf.stanford.edu>
Message-ID: <20050512103552.9CDF.YAMANAKA@snowmass.stanford.edu>

Move to 12:30-15:00.
Sorry for late notice.

------- 
Kazuhiko Yamanaka
Harris Group, Solid State & Photonics Lab,
Center for Integrated Systems,
Stanford University
CIS-X Rm 126X,
Stanford, CA 94305-4075
Tel :    (650)725-6909
Fax:    (650)723-4659
E-mail : yamanaka at snowmass.stanford.edu



From jonschuller at yahoo.com  Tue May 17 19:03:48 2005
From: jonschuller at yahoo.com (jon schuller)
Date: Tue, 17 May 2005 19:03:48 -0700 (PDT)
Subject: Which days are GaAs users only?
Message-ID: <20050518020348.43301.qmail@web51406.mail.yahoo.com>

Hello all,
  Sorry, it's been a while since I used the pquest.To
anyone who knows the answer, which days are devoted to
GaAs users only?

Thanks,
Jon

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From jimkruger at yahoo.com  Wed May 18 07:03:36 2005
From: jimkruger at yahoo.com (jim kruger)
Date: Wed, 18 May 2005 07:03:36 -0700 (PDT)
Subject: Which days are GaAs users only?
In-Reply-To: 6667
Message-ID: <20050518140336.61472.qmail@web40908.mail.yahoo.com>

The historical schedule has been Sunday through
Tuesday for non-IIIV users and Wednesday through
Saturday for III-V.  I have been interpreting that as
Su-Tu for possible use with F based etching (Cl not
excluded) and W-Sa for Cl and inert gas etching.  The
concept is that a Fluorocarbon memory might interfere
with Cl based etching.  

I have been studying the question and believe that a
reasonable pre-clean with O2 followed by seasoning
with the recipe to be used should be adequate to
mitigate the memory effects.  I therefore promote some
flexibility in the guidelines; if no III-V use is
reserved, the system should be open to non-IIIV users
W-Sa, and similarly in the other direction.  While use
is fairly light, I think this should work.  If use
becomes heavier, efficiency may result from grouping F
and non-F etching.  

An example:  no reservations were in place for this
week so I scheduled a training session for two
students on Thursday AM  (Cl -based etch but not
IIIV).

I am open to other opinions.  Jim McVittie has the
final authority on questions of use.  He generally
consults with a representative group of IIIV users
(gigi, raldaz, mwiemer) and  non IIIV,  (jimkruger)
when making a call.

I am happy to talk with anyone about use of the
system, or any processing question for that matter.

Jim Kruger
Cell phone 650-704-8902

--- jon schuller <jonschuller at yahoo.com> wrote:
> Hello all,
>   Sorry, it's been a while since I used the
> pquest.To
> anyone who knows the answer, which days are devoted
> to
> GaAs users only?
> 
> Thanks,
> Jon
> 
> __________________________________________________
> Do You Yahoo!?
> Tired of spam?  Yahoo! Mail has the best spam
> protection around 
> http://mail.yahoo.com 
> 


		
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