Which days are GaAs users only?
jimkruger at yahoo.com
Wed May 18 07:03:36 PDT 2005
The historical schedule has been Sunday through
Tuesday for non-IIIV users and Wednesday through
Saturday for III-V. I have been interpreting that as
Su-Tu for possible use with F based etching (Cl not
excluded) and W-Sa for Cl and inert gas etching. The
concept is that a Fluorocarbon memory might interfere
with Cl based etching.
I have been studying the question and believe that a
reasonable pre-clean with O2 followed by seasoning
with the recipe to be used should be adequate to
mitigate the memory effects. I therefore promote some
flexibility in the guidelines; if no III-V use is
reserved, the system should be open to non-IIIV users
W-Sa, and similarly in the other direction. While use
is fairly light, I think this should work. If use
becomes heavier, efficiency may result from grouping F
and non-F etching.
An example: no reservations were in place for this
week so I scheduled a training session for two
students on Thursday AM (Cl -based etch but not
I am open to other opinions. Jim McVittie has the
final authority on questions of use. He generally
consults with a representative group of IIIV users
(gigi, raldaz, mwiemer) and non IIIV, (jimkruger)
when making a call.
I am happy to talk with anyone about use of the
system, or any processing question for that matter.
Cell phone 650-704-8902
--- jon schuller <jonschuller at yahoo.com> wrote:
> Hello all,
> Sorry, it's been a while since I used the
> anyone who knows the answer, which days are devoted
> GaAs users only?
> Do You Yahoo!?
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