broke my wafer in pquest

Rafael Ignacio Aldaz raldaz at stanford.edu
Wed Nov 2 09:25:08 PST 2005


Patrick,
I guess everyone makes mistakes.  However, remember you should always
watch the arm when is loading and unloading wafer and have the keyboard
ready so you can press ESC immediately if something goes wrong (always
be mentally prepare for the worse).
 
Rafael
 
-----Original Message-----
From: Patrick Lu [mailto:patricklu at gmail.com] 
Sent: Wednesday, November 02, 2005 12:52 AM
To: pquest at snf.stanford.edu
Subject: broke my wafer in pquest
 
Stupid mistake on my part: the wafer was sitting on the wafer holder in
the load chamber, and I told it to unload. When the arm carried the
wafer into the chamber, not surprisingly the wafer broke. Some of my
wafer is still on the chuck. Sorry for the inconvenience!

I wanted to stop the unload process when I saw it carrying my wafer into
the etch chamber, but in the 10 seconds or so that I had I couldn't
figure it out. If someone could enlighten me that would be nice. Again,
sorry for any inconvenience and I promise that it will be a long time
before something like this happens again.

Also, if it's possible to rescue my wafer shards that would be cool.

Patrick


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