PQuest Procedural Change

Ed Myers edmyers at stanford.edu
Mon Apr 10 13:30:56 PDT 2006

PQuest Community,

In response to the PQuest User's community, we will be separating the month 
between chlorine and fluorine etch chemistries.  The request is for ~3 
weeks of III-V chlorine etch and ~1 week of fluorine etch.  Following the 
fluorine etch week, the chamber will receive a wet clean, before being 
released for the chlorine etches.  I will reserve the clean days for the 
next several months on Coral.

Calender days 1st through 22nd are for chlorine only chemistries.

Calendar days 23rd through the last day of the month are for fluorine etch 

Chamber wet cleans will be done on, or near the first of every month.

In order to accommodate the wafers currently in process, this change will 
be instituted beginning May 1st.


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