Reminder: PQuest Procedural Change

Ed Myers edmyers at
Mon Apr 24 10:11:14 PDT 2006

Pquest Users,

The new policy regarding etch chemistries in the PQuest takes effect next 
week.  I have reserved Monday, May 1st for the chamber clean.  Following 
the chamber clean, only chlorine chemistries will be allowed.  On May 23rd 
the system will switch over to fluorine chemistries.


>Date: Mon, 10 Apr 2006 13:30:56 -0700
>To: pquest at
>From: Ed Myers <edmyers at>
>Subject: PQuest Procedural Change
>PQuest Community,
>In response to the PQuest User's community, we will be separating the 
>month between chlorine and fluorine etch chemistries.  The request is for 
>~3 weeks of III-V chlorine etch and ~1 week of fluorine etch.  Following 
>the fluorine etch week, the chamber will receive a wet clean, before being 
>released for the chlorine etches.  I will reserve the clean days for the 
>next several months on Coral.
>Calender days 1st through 22nd are for chlorine only chemistries.
>Calendar days 23rd through the last day of the month are for fluorine etch 
>Chamber wet cleans will be done on, or near the first of every month.
>In order to accommodate the wafers currently in process, this change will 
>be instituted beginning May 1st.

More information about the pquest mailing list