Reminder: PQuest Procedural Change

Ed Myers edmyers at stanford.edu
Mon Apr 24 10:11:14 PDT 2006


Pquest Users,

The new policy regarding etch chemistries in the PQuest takes effect next 
week.  I have reserved Monday, May 1st for the chamber clean.  Following 
the chamber clean, only chlorine chemistries will be allowed.  On May 23rd 
the system will switch over to fluorine chemistries.

Regards,


>Date: Mon, 10 Apr 2006 13:30:56 -0700
>To: pquest at snf.stanford.edu
>From: Ed Myers <edmyers at stanford.edu>
>Subject: PQuest Procedural Change
>
>
>PQuest Community,
>
>In response to the PQuest User's community, we will be separating the 
>month between chlorine and fluorine etch chemistries.  The request is for 
>~3 weeks of III-V chlorine etch and ~1 week of fluorine etch.  Following 
>the fluorine etch week, the chamber will receive a wet clean, before being 
>released for the chlorine etches.  I will reserve the clean days for the 
>next several months on Coral.
>
>Calender days 1st through 22nd are for chlorine only chemistries.
>
>Calendar days 23rd through the last day of the month are for fluorine etch 
>chemistries.
>
>Chamber wet cleans will be done on, or near the first of every month.
>
>In order to accommodate the wafers currently in process, this change will 
>be instituted beginning May 1st.
>
>Regards,





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