Reminder: PQuest Procedural Change
edmyers at stanford.edu
Mon Apr 24 10:11:14 PDT 2006
The new policy regarding etch chemistries in the PQuest takes effect next
week. I have reserved Monday, May 1st for the chamber clean. Following
the chamber clean, only chlorine chemistries will be allowed. On May 23rd
the system will switch over to fluorine chemistries.
>Date: Mon, 10 Apr 2006 13:30:56 -0700
>To: pquest at snf.stanford.edu
>From: Ed Myers <edmyers at stanford.edu>
>Subject: PQuest Procedural Change
>In response to the PQuest User's community, we will be separating the
>month between chlorine and fluorine etch chemistries. The request is for
>~3 weeks of III-V chlorine etch and ~1 week of fluorine etch. Following
>the fluorine etch week, the chamber will receive a wet clean, before being
>released for the chlorine etches. I will reserve the clean days for the
>next several months on Coral.
>Calender days 1st through 22nd are for chlorine only chemistries.
>Calendar days 23rd through the last day of the month are for fluorine etch
>Chamber wet cleans will be done on, or near the first of every month.
>In order to accommodate the wafers currently in process, this change will
>be instituted beginning May 1st.
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