From cbax at stanford.edu  Fri Feb 17 19:31:14 2006
From: cbax at stanford.edu (Cesar M Baxter)
Date: Fri, 17 Feb 2006 19:31:14 -0800
Subject: PQuest 
Message-ID: <1140233474.43f6950292e9d@webmail.stanford.edu>



 Mary,

 I wet cleaned the chamber on PQuest and there was alot of byproduct
build up on the chuck and clamping ring but, I did not see any flakes or
particulates in the chamber and I also, checked and verified the throttle
control, rf power and gas flows and there all with in spec(+/-5%). I run
a long O2 plasma clean.


Cesar