PQuest Preventive Maintenance
nbelov at nanochip.com
Thu Mar 23 10:01:23 PST 2006
Thank you for bringing up the issue.
Preventive maintenance is a set of procedures.
I would suggest to e-mail a detailed description of your approach to the
preventive maintenance to PQuest users and to ask for a feedback.
In general, it is clear to me that regular maintenance is absolutely
From: Ed Myers [mailto:edmyers at stanford.edu]
Sent: Wednesday, March 22, 2006 1:51 PM
To: pquest at snf.stanford.edu
Cc: mtang at stanford.edu; rissman at stanford.edu
Subject: PQuest Preventive Maintenance
Does the PQuest community want the SNF staff to schedule regular
maintenance on the PQuest chamber?
A month ago Ceser cleaned the PQuest chamber after we received some
complaints on repeatability of an etch process. Apparently, this had a
very positive effect on the user's etch. The SNF staff would like to
on more responsibility in maintaining the chamber condition, if it is
agreeable with the PQuest community. I'm told that manual cleaning of
chamber is very unpleasant. The proposed approach would mix in manual
chamber cleans along with evaluation of a shutdown-chamber clean recipe
similar to what Elmer added to the AMT etcher.
We will plan on implementing a preventive maintenance program unless we
hear objections from the PQuest user community. We are also looking for
champion to help us design and evaluate the effects of any preventive
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