etching BCB

[Praveen P.S.]

Dear Pquest users,

            I am planning to use pquest to etch a thin layer of BCB (approx
0.2 to 0.5 microns). If any of you have any recipe file that I could use,
please let me know.

 

Thanks for any suggestions in advance

 

Regards,

Praveen

 

 

 

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