From shabbir.bashar at nlight.net Wed Jan 24 17:51:57 2007 From: shabbir.bashar at nlight.net (shabbir.bashar) Date: Wed, 24 Jan 2007 17:51:57 -0800 Subject: Freon Use Contaminated PQuest Message-ID: Hi Everyone, I just wanted to bring to your attention the policy regarding usage of the ECR etcher, PQuest. As I understand it, the first three weeks of a given month are allocated to non-Freon use - i.e. no polymers, only semiconductors like Gallium Arsenide or Indium Phosphide. Earlier this month (first week of January) I used the Pquest using my standard recipe and was pleased to get the desired etch rate and results I wanted with my Indium Phosphide wafer. A week later (Second week of January), Pradeep used the same recipe on parts of the same wafer that I had used (i.e. identical pieces in all respect as the two pieces dry etched at a week's interval came from the same original wafer and had a hard oxide mask). His results were drastically different to mine - considerably slower and left a lot of debris on the wafer. We have since then put our work on hold. Pradeep and I have since discussed this issue at length with Rafael Aldaz from Prof. Jim Harris's group. It is Rafael's opinion that someone must have used the a Freon based etch recipe sometime between my use and Pradeep's use i.e. late first week of January to early second week of January. The Freon eats up the Chlorine in my recipe and as a result slows down the etch rate; in addition it also produces the unwanted debris around the etched areas. In order to decontiminate the etch chamber, it has to be opened to atmosphere and hand wiped with IPA and the chlorine based recipe run for a day or so to pre-condition it. Only after that can there be any confidence of reproducing chlorine based etch results. There is currently no log book for the PQuest. I believe the PQuest is scheduled for routine chamber-clean around this time of the month. I would like to use the tool in the early part of next week (first week of February) if at all possible. Would someone please look into these issues and let me if this sounds reasonable. Kind regards, Shabbir. ================= Shabbir A. Bashar, PhD nLight Photonics Corp. 5408 NE 88th Street, Bldg. E Vancouver, WA 98665 Cell: +1 510 386 7304 Office: +1 360 713 5145 Fax: +1 360 546 1960 E-mail: Shabbir.Bashar at nLight.net Web: www.nLight.net -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- Notice: The information in this electronic transmission may contain confidential or legally privileged information and is intended solely for the individual(s) named above. 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From shabbir.bashar at nlight.net Fri Jan 26 09:31:45 2007 From: shabbir.bashar at nlight.net (shabbir.bashar) Date: Fri, 26 Jan 2007 09:31:45 -0800 Subject: Pquest Usage History Message-ID: Hi Ed, Please see attached a couple of screen shots of PQuest Usage history. It sounds like someone who used the PQuest between the 4th of and January and the 13th may have used Freon. I cant go any further back on the Pquest history using remote Coral. Hope this helps. Shabbir ================= Shabbir A. Bashar, PhD nLight Photonics Corp. 5408 NE 88th Street, Bldg. E Vancouver, WA 98665 Cell: +1 510 386 7304 Office: +1 360 713 5145 Fax: +1 360 546 1960 E-mail: Shabbir.Bashar at nLight.net Web: www.nLight.net -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... 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This message (including any attachments) may contain information which is export controlled and is limited in distribution to authorized persons. If in doubt, please contact the nLight Technology Security Officer at 360-566-4471. From edmyers at stanford.edu Fri Jan 26 09:49:02 2007 From: edmyers at stanford.edu (Ed Myers) Date: Fri, 26 Jan 2007 09:49:02 -0800 Subject: Pquest Usage History In-Reply-To: References: Message-ID: <6.2.5.6.2.20070126094140.03bd7c50@stanford.edu> Shabbir, I am off campus today and soon will be out of email contact. I did this yesterday. I know the two people who used the system while Pradeep was running the samples. I have talked to both of these groups this year, on different matters regarding the pquest. One was directly related to what recipe they were running. I was reassured it has been their standard recipe they have been running for years. The other is from an optics group who indicated how well the system and etches have been performing since we segregated the weeks. The reason I keep asking for which days where Pradeep saw the problem, is so I can go to them with data. Ed At 09:31 AM 1/26/2007, shabbir.bashar wrote: >Hi Ed, > >Please see attached a couple of screen shots of PQuest Usage >history. It sounds like someone who used the PQuest between the 4th >of and January and the 13th may have used Freon. I cant go any >further back on the Pquest history using remote Coral. > >Hope this helps. > >Shabbir >================= >Shabbir A. Bashar, PhD >nLight Photonics Corp. >5408 NE 88th Street, Bldg. E >Vancouver, WA 98665 >Cell: +1 510 386 7304 >Office: +1 360 713 5145 >Fax: +1 360 546 1960 >E-mail: Shabbir.Bashar at nLight.net >Web: www.nLight.net > > > > >Content-Type: text/plain; > >Notice: The information in this electronic transmission may contain >confidential or legally privileged information and is intended >solely for the individual(s) named above. If you are not an intended >recipient or an authorized agent, you are hereby notified that >reading, distributing, or otherwise disseminating, copying or taking >any action based on the contents of this transmission is strictly >prohibited. Any unauthorized interception of this transmission is >illegal under law. If you have received this transmission in error, >please notify the sender then destroy all electronic and print >copies of this transmission. The data contained herein may contain >EXPORT CONTROLLED information. This message (including any >attachments) may contain information which is export controlled and >is limited in distribution to authorized persons. If in doubt, >please contact the nLight Technology Security Officer at 360-566-4471. From ifushman at stanford.edu Sun Jan 28 14:45:49 2007 From: ifushman at stanford.edu (Ilya Fushman) Date: Sun, 28 Jan 2007 14:45:49 -0800 Subject: Pquest Usage History In-Reply-To: <6.2.5.6.2.20070126094140.03bd7c50@stanford.edu> References: <6.2.5.6.2.20070126094140.03bd7c50@stanford.edu> Message-ID: <28bfad130701281445i7f9fcc2cy711eb118bed5e2ac@mail.gmail.com> Hi, Since the p-quest seems contaminated, and if there are no strong objections, is it possible to clean it this week? My samples did not come out right when I etched last week, and I'd like to etch as soon as possible. Thanks, -ilya On 1/26/07, Ed Myers < edmyers at stanford.edu> wrote: > > Shabbir, > > I am off campus today and soon will be out of email contact. > > I did this yesterday. I know the two people who used the system > while Pradeep was running the samples. I have talked to both of > these groups this year, on different matters regarding the > pquest. One was directly related to what recipe they were > running. I was reassured it has been their standard recipe they have > been running for years. The other is from an optics group who > indicated how well the system and etches have been performing since > we segregated the weeks. > > The reason I keep asking for which days where Pradeep saw the > problem, is so I can go to them with data. > > Ed > > At 09:31 AM 1/26/2007, shabbir.bashar wrote: > >Hi Ed, > > > >Please see attached a couple of screen shots of PQuest Usage > >history. It sounds like someone who used the PQuest between the 4th > >of and January and the 13th may have used Freon. I cant go any > >further back on the Pquest history using remote Coral. > > > >Hope this helps. > > > >Shabbir > >================= > >Shabbir A. Bashar, PhD > >nLight Photonics Corp. > >5408 NE 88th Street, Bldg. E > >Vancouver, WA 98665 > >Cell: +1 510 386 7304 > >Office: +1 360 713 5145 > >Fax: +1 360 546 1960 > >E-mail: Shabbir.Bashar at nLight.net > >Web: < http://www.nlight.net/>www.nLight.net > > > > > > > > > >Content-Type: text/plain; > > > >Notice: The information in this electronic transmission may contain > >confidential or legally privileged information and is intended > >solely for the individual(s) named above. If you are not an intended > >recipient or an authorized agent, you are hereby notified that > >reading, distributing, or otherwise disseminating, copying or taking > >any action based on the contents of this transmission is strictly > >prohibited. Any unauthorized interception of this transmission is > >illegal under law. If you have received this transmission in error, > >please notify the sender then destroy all electronic and print > >copies of this transmission. The data contained herein may contain > >EXPORT CONTROLLED information. This message (including any > >attachments) may contain information which is export controlled and > >is limited in distribution to authorized persons. If in doubt, > >please contact the nLight Technology Security Officer at 360-566-4471. > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From shabbir.bashar at nlight.net Mon Jan 29 00:00:58 2007 From: shabbir.bashar at nlight.net (shabbir.bashar) Date: Mon, 29 Jan 2007 00:00:58 -0800 Subject: Pquest Usage History In-Reply-To: <28bfad130701281445i7f9fcc2cy711eb118bed5e2ac@mail.gmail.com> References: <6.2.5.6.2.20070126094140.03bd7c50@stanford.edu> <28bfad130701281445i7f9fcc2cy711eb118bed5e2ac@mail.gmail.com> Message-ID: I'd would so second that motion!!! I flew into San Jose a few hours ago .. expediting the clean-up of the PQuest would really help me out a lot!! Ilya, thanks for chiming in. Your observations also support my and Rafael's thinking. Kind regards, ================= Shabbir A. Bashar, PhD nLight Photonics Corp. 5408 NE 88th Street, Bldg. E Vancouver, WA 98665 Cell: +1 510 386 7304 Office: +1 360 713 5145 Fax: +1 360 546 1960 E-mail: Shabbir.Bashar at nLight.net Web: www.nLight.net ________________________________ From: illsbills at gmail.com [mailto:illsbills at gmail.com] On Behalf Of Ilya Fushman Sent: Sunday, January 28, 2007 2:46 PM To: Ed Myers Cc: shabbir.bashar; emyers at snf.stanford.edu; Pradeep Nataraj; mtang at snf.stanford.edu; shott at snf.stanford.edu; rissman at snf.stanford.edu; cbaxter at snf.stanford.edu; mahnaz at snf.stanford.edu; latta at snf.stanford.edu; jimkruger at snf.stanford.edu; Rafael Ignacio Aldaz; pquest at snf.stanford.edu Subject: Re: Pquest Usage History Hi, Since the p-quest seems contaminated, and if there are no strong objections, is it possible to clean it this week? My samples did not come out right when I etched last week, and I'd like to etch as soon as possible. Thanks, -ilya On 1/26/07, Ed Myers < edmyers at stanford.edu > wrote: Shabbir, I am off campus today and soon will be out of email contact. I did this yesterday. I know the two people who used the system while Pradeep was running the samples. I have talked to both of these groups this year, on different matters regarding the pquest. One was directly related to what recipe they were running. I was reassured it has been their standard recipe they have been running for years. The other is from an optics group who indicated how well the system and etches have been performing since we segregated the weeks. The reason I keep asking for which days where Pradeep saw the problem, is so I can go to them with data. Ed At 09:31 AM 1/26/2007, shabbir.bashar wrote: >Hi Ed, > >Please see attached a couple of screen shots of PQuest Usage >history. It sounds like someone who used the PQuest between the 4th >of and January and the 13th may have used Freon. I cant go any >further back on the Pquest history using remote Coral. > >Hope this helps. > >Shabbir >================= >Shabbir A. Bashar, PhD >nLight Photonics Corp. >5408 NE 88th Street, Bldg. E >Vancouver, WA 98665 >Cell: +1 510 386 7304 >Office: +1 360 713 5145 >Fax: +1 360 546 1960 >E-mail: Shabbir.Bashar at nLight.net >Web: < http://www.nlight.net/ >www.nLight.net > > > > >Content-Type: text/plain; > >Notice: The information in this electronic transmission may contain >confidential or legally privileged information and is intended >solely for the individual(s) named above. If you are not an intended >recipient or an authorized agent, you are hereby notified that >reading, distributing, or otherwise disseminating, copying or taking >any action based on the contents of this transmission is strictly >prohibited. Any unauthorized interception of this transmission is >illegal under law. If you have received this transmission in error, >please notify the sender then destroy all electronic and print >copies of this transmission. The data contained herein may contain >EXPORT CONTROLLED information. This message (including any >attachments) may contain information which is export controlled and >is limited in distribution to authorized persons. If in doubt, >please contact the nLight Technology Security Officer at 360-566-4471. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- Notice: The information in this electronic transmission may contain confidential or legally privileged information and is intended solely for the individual(s) named above. If you are not an intended recipient or an authorized agent, you are hereby notified that reading, distributing, or otherwise disseminating, copying or taking any action based on the contents of this transmission is strictly prohibited. Any unauthorized interception of this transmission is illegal under law. If you have received this transmission in error, please notify the sender then destroy all electronic and print copies of this transmission. The data contained herein may contain EXPORT CONTROLLED information. This message (including any attachments) may contain information which is export controlled and is limited in distribution to authorized persons. If in doubt, please contact the nLight Technology Security Officer at 360-566-4471. From jimkruger at yahoo.com Mon Jan 29 06:37:51 2007 From: jimkruger at yahoo.com (jim kruger) Date: Mon, 29 Jan 2007 06:37:51 -0800 (PST) Subject: Vote against early clean Message-ID: <662743.26013.qm@web38914.mail.mud.yahoo.com> I am planning experiments today and likely Tues, possibly Wed, so vote against the early clean. Unless, of course, I also experience difficulty. I belive that one or maybe two cleans were done ( due to wafers broken/stuck in chamber) during Period in Question. jim ____________________________________________________________________________________ Don't get soaked. Take a quick peak at the forecast with the Yahoo! Search weather shortcut. http://tools.search.yahoo.com/shortcuts/#loc_weather