From mailvv at stanford.edu Thu Nov 1 11:52:50 2007 From: mailvv at stanford.edu (Wei Wang) Date: Thu, 1 Nov 2007 11:52:50 -0700 Subject: pquest free 13:30pm-15:30pm today Message-ID: <001101c81cb8$66ca6700$6400a8c0@personalee2984> An HTML attachment was scrubbed... URL: From krivoire at stanford.edu Thu Nov 1 22:09:25 2007 From: krivoire at stanford.edu (Kelley Rivoire) Date: Thu, 1 Nov 2007 22:09:25 -0700 Subject: pquest down Message-ID: <18d3aabd0711012209h7172025dx8e2200dd84559570@mail.gmail.com> Hi pquest uesrs, The loadlock sensor detected the wafer incorrectly, and I didn't stop it in time, so I broke a wafer in the chamber tonight. Tool status is shutdown. Sorry to whoever this inconveniences. Kelley -------------- next part -------------- An HTML attachment was scrubbed... URL: From jimkruger at yahoo.com Tue Nov 27 15:03:15 2007 From: jimkruger at yahoo.com (jim kruger) Date: Tue, 27 Nov 2007 15:03:15 -0800 (PST) Subject: PQuest RF situation Message-ID: <22985.9590.qm@web38902.mail.mud.yahoo.com> Yesterday afternoon, EricP and Ray stepped in to help out since Cesar and Elmer were tied up with other down equipment. They determined that the RF supply was OK in manual mode, even when it was not functioning correctly under control of the PQuest. After the interface connectors were re-seated, the low RF/Bias problem seems cured. I saw no problems during a training session this morning. New symptom: The RF seems now to interfere with the on-screen temperature reading. Fortunately, that is of no consequence since the temperature control is external. You can ignore this. Bottom line: Use PQuest as usual, just keep a close eye on the fwd RF and the voltage. Report if different from expected. Jim Kruger ____________________________________________________________________________________ Be a better pen pal. Text or chat with friends inside Yahoo! Mail. See how. http://overview.mail.yahoo.com/ From vsih at stanford.edu Wed Nov 28 09:51:14 2007 From: vsih at stanford.edu (Vanessa Sih) Date: Wed, 28 Nov 2007 09:51:14 -0800 Subject: cancelling today's reservation Message-ID: <354289b40711280951y10decdf6j6e8fe1c91927badd@mail.gmail.com> pquest is available until 4:30pm -------------- next part -------------- An HTML attachment was scrubbed... URL: From jimkruger at yahoo.com Thu Nov 29 10:06:29 2007 From: jimkruger at yahoo.com (jim kruger) Date: Thu, 29 Nov 2007 10:06:29 -0800 (PST) Subject: Fluorine schedules Message-ID: <245685.43524.qm@web38905.mail.mud.yahoo.com> Consulting with Cesar and Elmer, I learn that the PQuest monthly wet clean will not occur before Monday morning, Dec 3. Therefore, I propose that the PQuest remain in ?Fluorine? mode until then. I know of at least one user scrambling to finish some Fluorine work in time. Next month, because of the lab Holiday shutdown, Dec. 19, 7am, there would be no ?Fluorine? time at all except as a special occurrence. I propose we designate Friday, Dec. 14, 6 pm as the start of a ?Fluorine allowed? period. This would give 2 week-days plus the weekend. As always, Chlorine chemistries are allow during the Fluorine time for anyone who wants to accept the small risk of interference. Please comment if you have concerns. Jim Kruger ____________________________________________________________________________________ Get easy, one-click access to your favorites. Make Yahoo! your homepage. http://www.yahoo.com/r/hs