pquest down

Kelley Rivoire krivoire at stanford.edu
Thu Nov 1 22:09:25 PDT 2007


Hi pquest uesrs,

The loadlock sensor detected the wafer incorrectly, and I didn't stop it in
time, so I broke a wafer in the chamber tonight. Tool status is shutdown.

Sorry to whoever this inconveniences.

Kelley
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/pquest/attachments/20071101/29eca4c3/attachment.html>


More information about the pquest mailing list