From mtang at stanford.edu Mon Oct 8 15:41:00 2007 From: mtang at stanford.edu (Mary Tang) Date: Mon, 08 Oct 2007 15:41:00 -0700 Subject: SF6 is unavailable Message-ID: <470AB1FC.9040803@stanford.edu> Please be aware. SF6 is currently unavailable. Do not attempt to use. Elmer is troubleshooting. Your SNF staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mtang at stanford.edu Fri Oct 12 17:56:10 2007 From: mtang at stanford.edu (Mary Tang) Date: Fri, 12 Oct 2007 17:56:10 -0700 Subject: Cl2 and HBr update Message-ID: <471017AA.9020602@stanford.edu> Hello everyone -- Thanks for your patience as our maintenance crew works on the gas supplies. The chlorine line repairs were completed and tested as planned on Monday. However, problems with the HBr panel were then uncovered. Since both cylinders share the same cabinet and purge system, repairs to the HBr panel prevented turn on of chlorine. Repairs of the shared system are now complete. As of today, chlorine has been turned back on for P5000etch. Nancy has tested it and it is now ready for metal etch. On Monday, chlorine will be turned back on for pquest, following a chamber clean. Depending on user demand/feedback, the monthly chlorine/fluorine chemistry cycle may be adjusted. Chlorine will be turned back on for lampoly on Tuesday. We anticipate that basic repairs to the HBr panel will be completed to allow HBr turn on Tuesday to both p5000etch and lampoly. Further repairs and updates to the gas delivery system are planned. We will keep you updated of any planned shutdowns of these gases. By the way, Cesar and Elmer have put in a lot of time to not only make these repairs happen, but put in measures to ensure against further occurrences of this type (Elmer especially, who's been on his own for the past couple of weeks.) Please do let them know they are appreciated -- Thanks, Your SNF staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From jimkruger at yahoo.com Tue Oct 16 11:16:54 2007 From: jimkruger at yahoo.com (jim kruger) Date: Tue, 16 Oct 2007 11:16:54 -0700 (PDT) Subject: PQuest Cl2 back on-line Message-ID: <215788.64181.qm@web38902.mail.mud.yahoo.com> Cl2 seems to be working as of this morning. A new Cl2 pressure regulator has been added so PQuest can be independent of other systems. Setting the regulator is tricky so it is NOT a user activity, but you can read the pressure through the window. Ask for help if you think there are issues. This morning Elmer, then Cesar helped me. The pressure is now set for ~ 7 psig with high flow (43 sccm) and inicates ~ 9 psig for low (1.5 sccm) flows. I set 1.5 and read initially 1.3, settling to 1.4 sccm. Historically, controlling low Cl2 flow has sometimes been a problem if regulator "creep" allows the line pressure to rise too far. This can be addressed by including a high Cl2 flow in a dummy step (i.e. Step 1 where you are verifying "wafer load OK" by reading backside He flow). Set 43 sccm for the 30 or 60 seconds of Step 1. Gas stabilization in Step 2 as before. The low Cl2 flow will settle much more quickly from above than from below. Then Step 3 as before. I am happy to help everyone, but in the interest of efficiency, if each Research Group would designate a "PQuest Expert" my time would go further. Remember, the system has been cleaned and is in Cl2 mode so NO Fluorine recipes until further notice. If there is insufficient time to work through all the saved-up GaAs Cl2 etches before the standard switch-over date of the 21st, ask Mary to consider an adjustment this month. Happy Etching, jimkruger ____________________________________________________________________________________ Boardwalk for $500? In 2007? Ha! Play Monopoly Here and Now (it's updated for today's economy) at Yahoo! Games. http://get.games.yahoo.com/proddesc?gamekey=monopolyherenow From jimkruger at yahoo.com Mon Oct 22 12:12:55 2007 From: jimkruger at yahoo.com (jim kruger) Date: Mon, 22 Oct 2007 12:12:55 -0700 (PDT) Subject: Pquest released 2-5pm today Message-ID: <585342.82405.qm@web38911.mail.mud.yahoo.com> Sorry for late notice, customer canceled. jim __________________________________________________ Do You Yahoo!? Tired of spam? Yahoo! Mail has the best spam protection around http://mail.yahoo.com From mtang at stanford.edu Mon Oct 22 12:23:22 2007 From: mtang at stanford.edu (Mary Tang) Date: Mon, 22 Oct 2007 12:23:22 -0700 Subject: Delay in Fluorine chemistry switch... Message-ID: <471CF8AA.102@stanford.edu> Hi everyone -- I'm conveying a special request from a couple of pquest users. Normally, we'd shift over to fluorine chemistries right about now. However, it looks like there are very few reservations and as chlorine was unavailable for so long, there's a proposal to keep pquest on chlorine for just a few more days so that all chlorine users can get their work through. So, unless there are some dire objections, we will keep pquest on chlorine chemistry until, say, midnight Wednesday night, and switch over to fluorines at 12:01 on Thursday morning. Any concerns, let me know. Thanks, Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu