Cl2 and HBr update

Mary Tang mtang at
Fri Oct 12 17:56:10 PDT 2007

Hello everyone --

Thanks for your patience as our maintenance crew works on the gas 
supplies.  The chlorine line repairs were completed and tested as 
planned on Monday.  However, problems with the HBr panel were then 
uncovered.  Since both cylinders share the same cabinet and purge 
system, repairs to the HBr panel prevented turn on of chlorine.  Repairs 
of the shared system are now complete.  As of today, chlorine has been 
turned back on for P5000etch.  Nancy has tested it and it is now ready 
for metal etch.  On Monday, chlorine will be turned back on for pquest, 
following a chamber clean.  Depending on user demand/feedback, the 
monthly chlorine/fluorine chemistry cycle may be adjusted.  Chlorine 
will be turned back on for lampoly on Tuesday.  We anticipate that basic 
repairs to the HBr panel will be completed to allow HBr turn on Tuesday 
to both p5000etch and lampoly.

Further repairs and updates to the gas delivery system are planned.  We 
will keep you updated of any planned shutdowns of these gases.

By the way, Cesar and Elmer have put in a lot of time to not only make 
these repairs happen, but put in measures to ensure against further 
occurrences of this type  (Elmer especially, who's been on his own for 
the past couple of weeks.)  Please do let them know they are appreciated --


Your SNF staff

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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