[PQuest] low DC voltage
koseki at stanford.edu
Tue Apr 8 12:47:06 PDT 2008
Dear PQuest community,
The DC voltage is low today, and the plasma is dark.
Also, the chamber pressure is way too high, as well as
it is difficult to obtain the impedance matching.
Previous user (mitsuru1) also told me that he got the
Would you, anyone who knows the machine well, please
improve the situation ? Thank you...
With my Ar/Cl2 recipe (koseki.rcp, initially copied from davegaas.rcp)
Yesterday (operated normally)
RF: set 200/ forward 202.9/ reflected 0.4
microwave: set 40/ forward 45/ reflected 1
DC bias: -59.6
Today (operating strangely)
RF: set 200/ forward 202.9/ reflected 9.9
microwave: set 40/ forward 46/ reflected 2
DC bias: -27.8
More information about the pquest