Extend fluorine gas usage for 1 week after PQuest is up?
lwchang at stanford.edu
Fri Aug 1 15:08:07 PDT 2008
I'll be etching LTO.
On Fri, Aug 1, 2008 at 3:05 PM, Shabbir A. Bashar, Ph.D. <
shabbir_bashar at yahoo.com> wrote:
> What material are you etching?
> ------Original Message------
> From: Li-Wen Chang
> Sender: lwchangmse at gmail.com
> To: faraon at stanford.edu
> To: Shabbir A. Bashar
> To: kdegreve at stanford.edu
> To: Jim Kruger
> Cc: pquest at snf.stanford.edu
> Cc: John Shott
> Cc: Mary Tang
> Cc: Cesar Baxter
> Cc: eenriquez at stanford.edu
> Sent: Aug 1, 2008 3:03 PM
> Subject: Extend fluorine gas usage for 1 week after PQuest is up?
> Dear PQuest users,
> You have reservations for PQuest throughout next week.
> I'm writing to see if it's okay with you to extend fluorine gas etch in the
> chamber for 1 week (or at least a few more days) since we have passed the
> last week of July while Cesar, Elmer, John and Jim were working very hard to
> bring this system up.
> I'd really appreciate if you all consent to extend the usage of fluorine
> gas in the etcher, but if there is major conflict please let me know.
> Thank you very much,
> Shabbir A. Bashar, PhD
> Cell/SMS: +1 510 386 7304
> E-mail: Shabbir_Bashar at yahoo.com
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