my pquest experience this morning
Thomas O'Sullivan
tdo at stanford.edu
Thu Aug 21 13:23:13 PDT 2008
I was able to do 2 successful runs (plus 1 dummy), but noticed 2 minor
glitches:
1) After the first clampdown, the sensor did not sense the clamp was down
2) When unloading every wafer, I noticed that it still "pops" out of
the groove, but fortunately, not enough to push it off the pins.
Suggest users watch every unloading process carefully because the wafer
could still fall off the pins
Good luck,
Tom
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