my pquest experience this morning

Thomas O'Sullivan tdo at stanford.edu
Thu Aug 21 13:23:13 PDT 2008


I was able to do 2 successful runs (plus 1 dummy), but noticed 2 minor 
glitches:
1)  After the first clampdown, the sensor did not sense the clamp was down
2)  When unloading every wafer, I noticed that it still "pops" out of 
the groove, but fortunately, not enough to push it off the pins.  
Suggest users watch every unloading process carefully because the wafer 
could still fall off the pins

Good luck,
Tom





More information about the pquest mailing list