my pquest experience this morning

Li-Wen Chang lwchang at stanford.edu
Thu Aug 21 23:54:47 PDT 2008


I've encountered the sensor problem not sensing clamp down on almost every
run (1 dummy + 4 wafers.)
Good thing is the unloading problem didn't appear to happen again...I ran
high temp etching (chuck temp. 80-140C) but I always cooled down the chuck
temp to ~50C to start unloading.

Li-Wen

On Thu, Aug 21, 2008 at 1:23 PM, Thomas O'Sullivan <tdo at stanford.edu> wrote:

> I was able to do 2 successful runs (plus 1 dummy), but noticed 2 minor
> glitches:
> 1)  After the first clampdown, the sensor did not sense the clamp was down
> 2)  When unloading every wafer, I noticed that it still "pops" out of the
> groove, but fortunately, not enough to push it off the pins.  Suggest users
> watch every unloading process carefully because the wafer could still fall
> off the pins
>
> Good luck,
> Tom
>
>
>
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