my pquest experience this morning

Andrei Faraon faraon at stanford.edu
Fri Aug 22 11:55:33 PDT 2008


I also etched yesterday and everything went well. There was some
redeposition on the chip but I suppose that was there because the chamber
was not cleaned after fluorine etching.

Andrei



On Thu, Aug 21, 2008 at 11:54 PM, Li-Wen Chang <lwchang at stanford.edu> wrote:

> I've encountered the sensor problem not sensing clamp down on almost every
> run (1 dummy + 4 wafers.)
> Good thing is the unloading problem didn't appear to happen again...I ran
> high temp etching (chuck temp. 80-140C) but I always cooled down the chuck
> temp to ~50C to start unloading.
>
> Li-Wen
>
>
> On Thu, Aug 21, 2008 at 1:23 PM, Thomas O'Sullivan <tdo at stanford.edu>wrote:
>
>> I was able to do 2 successful runs (plus 1 dummy), but noticed 2 minor
>> glitches:
>> 1)  After the first clampdown, the sensor did not sense the clamp was down
>> 2)  When unloading every wafer, I noticed that it still "pops" out of the
>> groove, but fortunately, not enough to push it off the pins.  Suggest users
>> watch every unloading process carefully because the wafer could still fall
>> off the pins
>>
>> Good luck,
>> Tom
>>
>>
>>
>


-- 
Andrei Faraon

Stanford University, Applied Physics
316 Via Pueblo Mall
Stanford, CA, 94305
Mobile: 650 714 7881
Office: 650 723 2279
www.stanford.edu/~faraon
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