From jimkruger at yahoo.com  Wed Dec  3 12:03:31 2008
From: jimkruger at yahoo.com (jim kruger)
Date: Wed, 3 Dec 2008 12:03:31 -0800 (PST)
Subject: PQuest released today 14:30-1700  and reminder
Message-ID: <690669.25467.qm@web38906.mail.mud.yahoo.com>

Reminder:  No Fluorine or temperatures > 50 C until next Tuesday under the new rules.

jim


      


From tdo at stanford.edu  Wed Dec  3 12:08:04 2008
From: tdo at stanford.edu (Thomas O'Sullivan)
Date: Wed, 03 Dec 2008 12:08:04 -0800
Subject: Reminder: No F-recipes this week
Message-ID: <4936E724.3090501@stanford.edu>

Fluorine-containing recipes, or etches with chuck temp >50C will begin 
next Tuesday, Dec 9. 


From krivoire at stanford.edu  Sat Dec  6 17:42:59 2008
From: krivoire at stanford.edu (Kelley Rivoire)
Date: Sat, 6 Dec 2008 17:42:59 -0800
Subject: someone edited oxygen.rcp to use chlorine gas
Message-ID: <18d3aabd0812061742p422d80cci541a63f4606838c8@mail.gmail.com>

Hi pquest users,

For everyone who uses oxygen.rcp, please note that someone changed the
gas composition to 43 sccm Cl2 and 2 sccm O2, so you will not want to
use it for oxygen cleans.

Also, if everyone could please not make major changes (like gas
composition, powers, etc) to recipes used by many pquest users like
oxygen.rcp and oxygen3.rcp (especially without telling other users!),
that would probably be best.

thanks,
Kelley


From mihuhou at stanford.edu  Sun Dec 14 19:50:54 2008
From: mihuhou at stanford.edu (Ying Chen)
Date: Sun, 14 Dec 2008 19:50:54 -0800 (PST)
Subject: PQuest has problems.
In-Reply-To: <4936E724.3090501@stanford.edu>
Message-ID: <628683867.3750411229313054416.JavaMail.root@zm06.stanford.edu>

Hi,

Towards the end of my runs today, the Pquest behaved abnormally. The temperature was not set anymore by the Watlow panel and the DC voltages were much higher than normal with the same recipes.

Ying