From shinichikoseki at gmail.com  Tue Jan  8 23:33:55 2008
From: shinichikoseki at gmail.com (Shinichi Koseki)
Date: Tue, 8 Jan 2008 23:33:55 -0800
Subject: pquest DC bias too low & chuck temp too high
Message-ID: <3b532e5a0801082333w15ebd97ajdf720cd9e87c6426@mail.gmail.com>

When I came in today, the chuck temperature was left at around 195C.
After setting the chiller temperature to 0 C and waiting ~ 5hrs, chuck
temp is still 50C.
Also, the DC bias is unusually low as -4.9V (, which is usually -60V
for my recipe)
The RF5S power supply indicates "RF out".
I rebooted all the unit, but the situation did not improve...
My Si carrier wafer became purple color.
I did not dare to etch my real sample in this condition...

Please take a look at it when you use. Thanks.

Shinichi


From mtang at stanford.edu  Thu Jan 17 13:45:02 2008
From: mtang at stanford.edu (Mary Tang)
Date: Thu, 17 Jan 2008 13:45:02 -0800
Subject: New Reservation Limits (4 hours during prime time)
Message-ID: <478FCC5E.9050003@stanford.edu>

Dear pquest User Community:

This is to inform everyone that effective immediately, there is a new 
reservations policy at pquest.  Advance reservations are limited to four 
hours per day during prime time, no more than one week in advance.  
Prime time is 8 am-6 pm.  The change has not yet been made on Coral, but 
until it is, any reservations that exceed this is subject to deletion. 

Please remember this is a shared tool and to be considerate of others' 
use -- give advance warning (a week?) to others in the user community if 
you make long reservations, even if off-hours.  And be willing to work 
with each other in sharing access as needed.

Thanks for your attention!

Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu