Aluminum etching in PQuest

Li-Wen Chang lwchang at stanford.edu
Thu Jul 24 12:40:51 PDT 2008


Dear PQuest users,
I'm wondering if anyone has done aluminum etching in PQuest.
My sample is gold contaminated and can not go in p5000.
I'd really appreciate if someone has a starting recipe for Al etching.

Thanks,
Li-Wen
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