GaAs etching using silica as mask

jiazhu at stanford.edu jiazhu at stanford.edu
Tue Jul 29 12:00:08 PDT 2008


Hi PQuest Users,

I am wondering whether anyone has any experience on GaAs etching using  
silica (SiO2) as mask before?
Any information regarding this will be very helpful!
Thanks.


regards,
Jia



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