From tdo at stanford.edu Fri Oct 3 09:48:09 2008 From: tdo at stanford.edu (Thomas O'Sullivan) Date: Fri, 03 Oct 2008 09:48:09 -0700 Subject: monthly clean? Message-ID: <48E64CC9.3060906@stanford.edu> Has the monthly wet clean been done yet this week? Thanks, Tom From jimkruger at yahoo.com Wed Oct 8 12:12:56 2008 From: jimkruger at yahoo.com (jim kruger) Date: Wed, 8 Oct 2008 12:12:56 -0700 (PDT) Subject: PQuest open today , 10-8-08 1330 to 1730 Message-ID: <713728.78666.qm@web38906.mail.mud.yahoo.com> samples delayed From tdo at stanford.edu Thu Oct 9 10:16:59 2008 From: tdo at stanford.edu (Thomas O'Sullivan) Date: Thu, 09 Oct 2008 10:16:59 -0700 Subject: sts and pquest available now Message-ID: <48EE3C8B.2070809@stanford.edu> sts and pquest available now, canceled due to unforeseen circumstance From lwchang at stanford.edu Fri Oct 10 10:29:36 2008 From: lwchang at stanford.edu (Li-Wen Chang) Date: Fri, 10 Oct 2008 10:29:36 -0700 Subject: Pquest free 1:30-5pm Message-ID: <8ab79e460810101029n191eeef8m82637fdb9aaa5583@mail.gmail.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From tdo at stanford.edu Wed Oct 15 23:15:32 2008 From: tdo at stanford.edu (Thomas O'Sullivan) Date: Wed, 15 Oct 2008 23:15:32 -0700 Subject: released 1-5pm tomorrow Message-ID: <48F6DC04.4030903@stanford.edu> From James.Q.Liu at jdsu.com Fri Oct 17 01:33:11 2008 From: James.Q.Liu at jdsu.com (James Q. Liu) Date: Fri, 17 Oct 2008 01:33:11 -0700 Subject: Reservation removed from 10:00am - 1:00pm, Friday 10/17 Message-ID: <0FC4C1B93D218E428D20BFCB9424D5D204B487B1@SJEXCH02.ds.jdsu.net> Samples aren't ready. Sorry for the short time notice... James -------------- next part -------------- An HTML attachment was scrubbed... URL: From krivoire at stanford.edu Sun Oct 19 12:46:20 2008 From: krivoire at stanford.edu (Kelley Rivoire) Date: Sun, 19 Oct 2008 12:46:20 -0700 (PDT) Subject: pquest free 7:30-10pm tonight Message-ID: <571623501.25051224445580489.JavaMail.root@zm02.stanford.edu> From lwchang at stanford.edu Sun Oct 19 17:30:58 2008 From: lwchang at stanford.edu (Li-Wen Chang) Date: Sun, 19 Oct 2008 17:30:58 -0700 Subject: laser detector Message-ID: <8ab79e460810191730h7c833e68r3d214a08efb7ffbb@mail.gmail.com> Dear pquest users, Has anyone used the laser detector recently? I started the program on the computer but it didn't seem to record data from the digital meter. Everything was connected fine...Has anyone seen this and know how to fix it? Thanks, Li-Wen -------------- next part -------------- An HTML attachment was scrubbed... URL: From jimkruger at yahoo.com Mon Oct 20 13:07:20 2008 From: jimkruger at yahoo.com (jim kruger) Date: Mon, 20 Oct 2008 13:07:20 -0700 (PDT) Subject: PQuest Laser voltmeter battery and He blow-by Message-ID: <257430.76210.qm@web38907.mail.mud.yahoo.com> Over the weekend, problems with the laser reorder were reported. I replaced the voltmeter battery and it seems to be working OK. Please be very careful not to push the "Backlight" button. It leaves the light on even if the meter is off and drains the battery very rapidly. The He is again high, about 7.5 sccm for 10 Torr. Perhaps the springs have been overheated again. The new springs seem more sensitive than the old generation. Long, high power burn-ins may be the cause. Or maybe dirt on the stage again results in the higher He. jim __________________________________________________ Do You Yahoo!? Tired of spam? Yahoo! Mail has the best spam protection around http://mail.yahoo.com From mtang at stanford.edu Thu Oct 23 08:47:33 2008 From: mtang at stanford.edu (Mary Tang) Date: Thu, 23 Oct 2008 08:47:33 -0700 Subject: PQuest User Survey Message-ID: <49009C95.4040507@stanford.edu> Dear PQuest user (or prospective PQuest user): The Etch Quality Circle is proposing changes to the way the allocation of etch chemistries is managed at the Pquest. Your inputs would be greatly appreciated; please see the Survey Monkey link below. The next Etch Quality Circle meeting is Wednesday, Oct. 29, at 2 pm in CIS 201. We trust we will have enough input to make the final decision by then. Interested parties are welcome to attend this meeting (please let us know if you plan to come.) http://www.surveymonkey.com/s.aspx?sm=AOqZY6TBzAHBptgBO2szEw_3d_3d Thanks, The Etch Quality Circle (tdo, jimkruger, nharjee, jprovine, lwchang, krivoire, faraon, latta, emyers, shott, eenriquez, mdickey, mtang) From mtang at stanford.edu Fri Oct 24 11:10:41 2008 From: mtang at stanford.edu (Mary Tang) Date: Fri, 24 Oct 2008 11:10:41 -0700 Subject: Please use the logbook Message-ID: <49020FA1.1080605@stanford.edu> Dear Pquest users -- Please enter your session data in the station logbook. This information is extremely helpful in establishing usage on this machine as well as for troubleshooting equiment and process problems. Remember, filling in station logbooks is not an option, but an obligation to your fellow labmembers. Action may be taken to address chronic offenders. Thanks for your attention -- Mary From lwchang at stanford.edu Sat Oct 25 15:07:11 2008 From: lwchang at stanford.edu (Li-Wen Chang) Date: Sat, 25 Oct 2008 15:07:11 -0700 Subject: pquest free from 3pm today Message-ID: <8ab79e460810251507l1f946acck9b87ae8ecd0e2eb0@mail.gmail.com> sorry for the late notice -------------- next part -------------- An HTML attachment was scrubbed... URL: From krivoire at stanford.edu Wed Oct 29 18:38:47 2008 From: krivoire at stanford.edu (Kelley Rivoire) Date: Wed, 29 Oct 2008 18:38:47 -0700 (PDT) Subject: pquest free tonight Message-ID: <260374060.2109721225330727569.JavaMail.root@zm02.stanford.edu> Canceling my session because of reports from previous users of very low or fluctuating DC bias. Kelley From chingmei at stanford.edu Thu Oct 30 13:28:45 2008 From: chingmei at stanford.edu (Ching-Mei Hsu) Date: Thu, 30 Oct 2008 13:28:45 -0700 (PDT) Subject: pquest free from 2pm Message-ID: <703444476.2742751225398525919.JavaMail.root@zm01.stanford.edu> Sorry about the late notice. Sample won't be ready. Ching-Mei -- Ching-Mei Hsu PhD Candidate Materials Science and Engineering Stanford University McCullough rm. 209 476 Lomita Mall Stanford, CA 94305 From mtang at stanford.edu Thu Oct 30 19:35:14 2008 From: mtang at stanford.edu (Mary Tang) Date: Thu, 30 Oct 2008 19:35:14 -0700 Subject: New Policy on Segregation of Etch Chemistries, effective immediately Message-ID: <490A6EE2.6080103@stanford.edu> Greetings pquest users: As you probably are aware, there has been a lot of discussion about the policy of segregating Cl2 from fluorine etching. Following a meeting with the Etch Quality Circle, where researchers from the Vuckovic, Harris, and Wong labs were in attendance, along with Jim Kruger, our pquest superuser, the new policy was defined. A survey of pquest users did not indicate undue burden with the proposed change. The new policy is as follows: - Pquest will undergo a wet/dry clean sequence on the 1st and 3rd Mondays of every month. - Etches during the following 7 days (inclusive of the 2nd and 4th Mondays) will be restricted to recipes that do not contain Fluorine, at chuck temperatures <=50C. This policy will increase the number of Fluorine-recipe days a month and no longer limit them to the end of the month. This new policy is effective immediately. The monthly chamber clean is scheduled for the morning of Monday, Nov. 3. The semimonthly schedule starts then. Many thanks to everyone for your feedback and willingness to work this out! There are several very happy students now.. The Etch Quality Circle