Update ....
John Shott
shott at stanford.edu
Sat Sep 6 19:00:01 PDT 2008
Plasma Quest community:
I know that a number of you are anxiously awaiting the return to service
of the Plasma Quest following its RF and DC bias issues. I had meant to
send out an update last night ... and then got side tracked with air
compressor stuff.
In any event, we made quite a bit of progress today. The machine is
fundamentally re-assembled and we have checked that the chuck can now
withstand at least 300 volts in atmosphere with no current draw. We
believe that this helps to confirm the hypothesis that RF problems were
created by wafer chips in the space between the chuck and the dark space
shield.
If things go well tomorrow morning, we will expect to do the final
alignment of the clamp assembly, hook up the RF supplies, and take
another look at the gate valve to make sure that it is behaving
appropriately.
If things proceed smoothly we will do our best to get the system under
vacuum and to test it operationally.
We'll try to send out another update tomorrow afternoon.
Have a good weekend,
John
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