From tdo at stanford.edu  Wed Aug  5 16:17:09 2009
From: tdo at stanford.edu (Thomas O'Sullivan)
Date: Wed, 05 Aug 2009 16:17:09 -0700
Subject: clean cycle?
Message-ID: <4A7A12F5.6050708@stanford.edu>

Hi all,
Where are we in the clean / chemistry schedule of pquest?

Thanks,
Tom


From krivoire at stanford.edu  Thu Aug  6 16:11:22 2009
From: krivoire at stanford.edu (Kelley Rivoire)
Date: Thu, 6 Aug 2009 16:11:22 -0700 (PDT)
Subject: pquest free 6-8 pm tonight
Message-ID: <1024882849.1460701249600282567.JavaMail.root@zm02.stanford.edu>

pquest free 6-8 pm tonight


From jimkruger at yahoo.com  Thu Aug  6 16:45:26 2009
From: jimkruger at yahoo.com (jim kruger)
Date: Thu, 6 Aug 2009 16:45:26 -0700 (PDT)
Subject: Pquest RF power
In-Reply-To: <359bb9f0908061616g219c22f9w8e3986a9d78b06f6@mail.gmail.com>
Message-ID: <795610.62363.qm@web38904.mail.mud.yahoo.com>


I have done no tests yet but the voltage for a given power seems to be back to ~ 1 yr ago.  Best guess is to increase RF pwr again to get the Voltage you had before.

jim

--- On Thu, 8/6/09, arka majumdar <arka.majumdar at gmail.com> wrote:

> From: arka majumdar <arka.majumdar at gmail.com>
> Subject: Pquest RF power
> To: jimkruger at yahoo.com
> Date: Thursday, August 6, 2009, 4:16 PM
> HI
> 
> Can you please let me know what RF we should use now. There
> have been two, 2 times decrease (so total a factor of
> 4)..now should we use the same power? or is it double/
> quadraple..
> 
> Thanks
> Sincerely
> Arka
> 
> 
> -- 
> Arka Majumdar 
> Graduate Student(MS/PhD)
> Ginzton Lab (Vuckovic Group)
> Stanford University
> www.cvitae.org/arkam/
> 
> 


      


From dlee76 at stanford.edu  Mon Aug 10 10:26:15 2009
From: dlee76 at stanford.edu (Donkoun Lee)
Date: Mon, 10 Aug 2009 10:26:15 -0700
Subject: Release PQUEST from 11:00 to 14:00
Message-ID: <C6A5A647.29C8%dlee76@stanford.edu>

Hi.

I am sorry for the late notice. Samples are not ready.

Don


-- 
Donkoun Lee
 
Ph.D Candidate
Prof. Shan X. Wang's Group
Dept. of Materials Science & Engineering, Stanford University
McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045

Office: (650)-723-2939
Fax: (650)-736-1984




From jimkruger at yahoo.com  Mon Aug 10 17:40:36 2009
From: jimkruger at yahoo.com (jim kruger)
Date: Mon, 10 Aug 2009 17:40:36 -0700 (PDT)
Subject: Temperature of PQUEST
In-Reply-To: <C6A6088A.29DC%dlee76@stanford.edu>
Message-ID: <596521.16548.qm@web38904.mail.mud.yahoo.com>



I can not be sure, but I think it is the reading that is in error and that the temperature can be about the same as the chiller, as before. See  the recent "Temperature message".

jim



jim
--- On Mon, 8/10/09, Donkoun Lee <dlee76 at stanford.edu> wrote:

> From: Donkoun Lee <dlee76 at stanford.edu>
> Subject: Temperature of PQUEST
> To: "jim kruger" <jimkruger at yahoo.com>
> Date: Monday, August 10, 2009, 5:25 PM
> Hi.
> 
> I have one question for you. I am wondering if the
> substrate temperature of
> the PQUEST is fine or not.
> 
> Thank you.
> Kind Regards,
> Donkoun Lee
> -- 
> Donkoun Lee
>  
> Ph.D Candidate
> Prof. Shan X. Wang's Group
> Dept. of Materials Science & Engineering, Stanford
> University
> McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA,
> 94305-4045
> 
> Office: (650)-723-2939
> Fax: (650)-736-1984
> 
> 
> 


      


From shott at stanford.edu  Wed Aug 12 19:35:16 2009
From: shott at stanford.edu (John Shott)
Date: Wed, 12 Aug 2009 19:35:16 -0700
Subject: Update ....
Message-ID: <4A837BE4.904@stanford.edu>

Pquest community:

With help from Jim McVittie and Jim Kruger, we were able to gain a 
better understanding of why the application of RF power has suddenly 
caused both the chuck thermocouple and the helium MFC to go nuts .... to 
use a technical term.  In fact, we have eliminated the disturbances seen 
on the helium MFC but are still seeing problems on the chuck 
thermocouple.   To resolve this, we are working on additional RF 
filtering on the thermocouple circuit.

We have components to be able to build an improved filter and will hope 
to be able to test that tomorrow.  We will send out an update if we are 
not able to resolve this issue by that time.

Thanks,

John



From tdo at stanford.edu  Thu Aug 27 09:28:18 2009
From: tdo at stanford.edu (Thomas O'Sullivan)
Date: Thu, 27 Aug 2009 09:28:18 -0700
Subject: Reminder: always watch loading and unloading
Message-ID: <4A96B422.4090306@stanford.edu>

Pquest users:
Please remember to watch *every load and unload *through the viewport to 
make sure the wafer is transferred correctly.  If you see the wafer 
fall, pressing "ESC" on the keyboard will hault all mechanical movement 
before it gets crushed by the arm.  That way you can save the wafer, and 
the chamber does not get covered in wafer fragments.

This is especially important after major maintenance (right now) as it 
is tricky to align everything properly.  Also if you watch/identify 
where the wafer gets mishandled, it helps maintenance troubleshoot the 
problem.

Thanks,
Tom
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From tdo at stanford.edu  Fri Aug 28 13:32:56 2009
From: tdo at stanford.edu (Thomas O'Sullivan)
Date: Fri, 28 Aug 2009 13:32:56 -0700
Subject: Fluorine policy next week
Message-ID: <4A983EF8.6080903@stanford.edu>

Pquest Users:
We would like to resume the normal schedule of fluorine vs. no-fluorine 
recipes on pquest.  Per the policy, next week would be a fluorine week, 
followed by a chamber wet clean on Monday, Sept 7th and then no-fluorine 
for 7 days.

Please let me know if this causes problems for a number of users.

As a reminder, here is the policy:
- Pquest will undergo a wet/dry clean sequence on the 1st and 3rd 
Mondays of every month.
- Etches during the following 7 days (inclusive of the 2nd and 4th 
Mondays) will be restricted to recipes that do not contain Fluorine, and 
chuck temperatures <=50C.

Best,
Tom